中国激光, 2002, 29 (3): 209, 网络出版: 2006-08-08
X切LiNbO3脊形结构集成电光M-Z型调制器
Integrated Electrooptic M-Z Modulator with Ridge Structure in X-cut LiNbO3
脊形结构 电光调制器 X切LiNbO3 M-Z型干涉仪 ridge structure electrooptic modulator X-Cut LiNbO3 Mach-Zehnder interferometer
摘要
采用X切LiNbO3基片,设计并研制了脊形结构集成电光Mach-Zehnder(M-Z)波导调制器,实验研制过程包含关键的LiNbO3基片湿腐蚀刻槽技术和大厚度电极制作技术.研究结果表明,脊形结构调制器与传统的平面结构调制器相比,在大幅度提高调制带宽方面,有着明显的优越性.
Abstract
An integrated electrooptic Mach-Zehnder modulator with ridge structure has been designed and fabricated by using X-cut LiNbO 3 substrate. The key techniques of LiNbO 3 wet etching and large thick electrode fabricating are contributed to form the ridge structure for the modulator. Experimental results show that the ridge-type optical modulator has much more obvious advantages in increasing the modulation bandwidth compared with a conventional modulator with planar structure.
陈福深, 李其聪. X切LiNbO3脊形结构集成电光M-Z型调制器[J]. 中国激光, 2002, 29(3): 209. 陈福深, 李其聪. Integrated Electrooptic M-Z Modulator with Ridge Structure in X-cut LiNbO3[J]. Chinese Journal of Lasers, 2002, 29(3): 209.
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