X切LiNbO<sub>3</sub>脊形结构集成电光M-Z型调制器

An integrated electrooptic Mach-Zehnder modulator with ridge structure has been designed and fabricated by using X-cut LiNbO 3 substrate. The key techniques of LiNbO 3 wet etching and large thick electrode fabricating are contributed to form the ridge structure for the modulator. Experimental results show that the ridge-type optical modulator has much more obvious advantages in increasing the modulation bandwidth compared with a conventional modulator with planar structure.

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陈福深, 李其聪. X切LiNbO₃脊形结构集成电光M-Z型调制器[J]. 中国激光, 2002, 29(3): 209. 陈福深, 李其聪. Integrated Electrooptic M-Z Modulator with Ridge Structure in X-cut LiNbO₃[J]. Chinese Journal of Lasers, 2002, 29(3): 209.

X切LiNbO₃脊形结构集成电光M-Z型调制器

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