光学学报, 1983, 3 (5): 443, 网络出版: 2011-09-15
一种便于使用的平面重程干涉测量法
A plane multipass interferometry convenient for using
摘要
在Fizeau平面干涉仪上,配备一Twyman型分束器,以构成一种便于使用的平面重程干涉测量法.误差分析指出:这种结构可以实现,有一定实用价值.实验表明:检测低反射光学元件,其灵敏度比之通常的Fizeau平面干涉法高1~2倍,检测高反射光学件,则可提高7~9倍.
Abstract
Providing the plane Fizeau interferometer with a Twyman-model beam splitter, authors have accomplished a plane multipass interferometry which is easy to operate. The errors analyses point out that: such arrangement is realizable and valuable for practical applications. Experiments show that its sensitivity is 1~2 times higher than the conventional Fizeau interferometer for testing the polished uncoated optical elements, 7~9 times for high reflective coated sufaces.
参考文献
向才新, 杨林. 一种便于使用的平面重程干涉测量法[J]. 光学学报, 1983, 3(5): 443. XIANG CAIXIN, YANG LIN. A plane multipass interferometry convenient for using[J]. Acta Optica Sinica, 1983, 3(5): 443.