本文发展了一种激光-CCD衍射谱分析系统,利用衍射谱位相恢复方法测量非球面光学件的面形。本文的方法不需要产生非球面参考波前,这就避免了通常干涉方法测量非球面的特殊困难。

A simple laser-CCD diffraction spectrum analysis system has been developed The phase retrieving of the diffraction spectra has been employed to measure the surface form of the aspheric optics. This method needs no aspheric reference wavefront which is required in the conventional interferometric aspheric measurements and is extremely difficult to be produced.