中国光学, 2015, 8 (4): 517, 网络出版: 2016-01-25   

大功率半导体激光合束进展

Advance on high power diode laser coupling
作者单位
中国科学院 长春光学精密机械与物理研究所, 吉林 长春 130033
摘要
经过近30年的发展, 半导体激光器已由信息器件逐步发展成为能量器件, 特别是大功率高光束质量半导体激光器, 已从泵浦光源过渡成为直接作用光源, 并部分应用在加工及**领域。本文介绍了大功率半导体激光单元发展现状, 分析讨论了各种激光合束技术及相应的合束光源, 介绍了长春光机所在激光合束方面所做的部分工作, 提出了我国半导体激光产业建设及发展的几点建议, 并对半导体激光技术的发展新动向进行了展望。随着单元亮度的提升和合束技术的成熟, 大功率半导体激光源作为间接光源和直接作用光源将在**和工业领域大放异彩。
Abstract
During the past 30 years of development, diode lasers have gradually become into energy components from the initial information ones. Especially for the high power diode laser source with high beam quality, it has been transformed from the pumping laser to the direct function laser source, and partly applied in the field of materials processing and national defense. The development situation on the laser units is firstly introduced. Then the various methods of laser combining and the corresponding combining sources are analyzed and discussed. The CIOMP's works on the laser combination are presented. Some suggestions for the development of diode laser industry in China are propounded. The new development trends of the diode laser technology are finally prospected. With the increase of the unit brightness and the mature of laser coupling technology, high power diode lasers, either as the direct sources or indirect sources, will have important impacts on the defense and industrial fields.
参考文献

[1] OVERTON G,BELFORTE D A,NOGEE A,et al.. Laser Marketplace 2015: lasers surround us in the year of light[J]. Laser Focus World,2015,51(1): 32.

[2] STICKLEY C M,FILIPKOWSKI M E,PARRA E,et al.. Future of high efficiency diode lasers[J]. SPIE,2005,5991: 59911O.

[3] STICKLEY C M,FILIPKOWSKI M E,PARRA E,et al.. Overview of progress in super high efficiency diodes for pumping high energy lasers[J]. SPIE,2006,6104: 610405.

[4] BACHMANN F. Goals and status of the German national research initiative BRIOLAS(brilliant diode lasers)[J]. SPIE,2007,6456: 645608.

[5] Osram Coordinates High-Brilliance Infrared Laser Project[EB/OL].[2013-02-22].http: //www.photonics.com/Article.aspx PID=6&VID=107&IID=665&AID=53121.

[6] Brilliant Industrial Diode Laser[EB/OL].[2014-03-31].http: //www.bridle.eu.

[7] KANSKAR M,EARLES T,GOODNOUGH T J,et al.. 73% CW power conversion efficiency at 50 W from 970 nm diode laser bars[J]. Electronics Lett.,2005,41(5): 245-247.

[8] PETERS M,ROSSIN V,EVERETT M,et al.. High-power, high-efficiency laser diodes at JDSU[J]. SPIE,2007,6456: 64560G.

[9] CRUMP P,DONG W M,GRIMSHAW M,et al.. 100-W+ diode laser bars show >71% power conversion from 790- nm to 1000-nm and have clear route to >85%[J]. SPIE,2007,6456: 64560M.

[10] CRUMP P,GRIMSHAW M,WANG J,et al.. 85% Power conversion efficiency 975-nm broad area diode lasers at 50 ℃, 76% at 10 ℃[C]. Conference on Lasers and Electro-Optics/Quantum Electronics and Laser Science Conference and Photonic Applications Systems Technologies,Long Beach,California,USA, May 21,2006: JWB24.

[11] LI H,REINHARDT F,CHYR I,et al.. High-efficiency, high-power diode laser chips, bars,and stacks[J]. SPIE,2008,6876: 68760G.

[12] MARMO J,INJEYAN H,KOMINE H,et al.. Joint high power solid state laser program advancements at Northrop Grumman[J]. SPIE,2009,7195: 719507.

[13] WALLACE J. Materials processing: 100 kW fiber laser, power meter serve industry[J]. Laser Focus World,2013,49(12): 13-14.

[14] TOMM J W,ZIEGLER M,HEMPEL M,et al.. Mechanisms and fast kinetics of the catastrophic optical damage(COD) in GaAs-based diode lasers[J]. Laser Photonics Rev.,2011,5(3): 422441.

[15] WADE J K,MAWST L J,BOTEZ D,et al.. 8.8 W CW power from broad-waveguide Al-free active-region (λ=805 nm) diode lasers[J]. Electron. Lett.,1998,34(11): 1100-1101.

[16] KO H C,CHO M W,CHANG J H,et al.. A new structure of 780 nm AlGaAs/GaAs high power laser diode with non-absorbing mirrors[J]. Appl. Phys. A,1999,68(4): 467.

[17] RESSEL P,ERBERT G,ZEIMER U,HAUSLER K,et al.. Novel passivation process for the mirror facets of high-power semiconductor diode lasers[J]. IEEE Photonics Technol. Lett.,2005,17(5): 962964.

[18] MORITA T,NAGAKURA T,TORII K,et al.. High-efficient and reliable broad-area laser diodes with a window structure[J]. IEEE J. Sel. Topics Quantum Electron.,2013,19(4): 1502104.

[19] CRUMP P,BLUME G,PASCHKE K,et al.. 20W continuous wave reliable operation of 980 nm broad-area single emitter diode lasers with an aperture of 96 μm[J]. SPIE,2009,7198: 719814.

[20] GAO W,XU Z T,CHENG L S,et al.. High power high brightness single emitter laser diodes at axcel photonics[J]. SPIE,2008,6876: 68761F.

[21] DEMIR A,PETERS M,DUESTERBERG R,et al.. 29.5 W Continuous wave output from 100 μm wide laser diode[J]. SPIE,2015,9348: 93480G.

[22] ZORNA M,HULSEWEDE R,SCHULZE H,et al.. New developments of high-power single emitters and laser bars at JENOPTIK[J]. SPIE,2009,7918: 79180S.

[23] MODAK P,GOUTAIN E,BAMBRICK D,et al.. 253 mW/μm maximum power density from 9xx nm epitaxial laser structures with d/Γ greater than 1 μm[C]. IEEE 21st Int. Semicond. Laser Conf. Digest,Sorrento,Italy,September 14-18,2008: 135-136.

[24] YALAMANCHILI P,ROSSINB V,SKIDMORE J,et al.. High-power, high-efficiency fiber-coupled multimode laser-diode pump module(9XX nm) with high-reliability[J]. SPIE,2008,6876: 687612.

[25] CRUMP P,RODER C,STASKE R,et al.. Limitations to peak continuous wave power in high power broad area single emitter 980 nm diode lasers[J]. Electronics Lett.,2008,44(21): 1253-1255.

[26] CRUMP P,WENZEL H,ERBERT G,et al.. Progress in increasing the maximum achievable output power of broad area diode lasers[J]. SPIE,2012,8241: 82410U.

[27] LICHTENSTEIN N,KREJCI M,MANZ Y,et al.. Recent developments for BAR and BASE: setting the Trends[J]. SPIE,2007,6876: 68760C.

[28] XU Z,GAO W,CHENG L,et al.. Highly reliable, high brightness, 915 nm laser diodes for fiber laser applications[J]. SPIE,2008,6909: 69090Q.

[29] LI H X,REINHARDT F,CHYR I,et al.. High-efficiency, high-power diode laser chips, bars, and stacks[J]. SPIE,2008,6876: 68760G.

[30] LI H X,CHYR I,JIN X,et al.. >700 W continuous-wave output power from single laser diode bar[J]. Electron. Lett.,2007,43(1): 27-28.

[31] LORENZEN D,SCHRDER M,MEUSEL J,et al.. Comparative performance studies of indium and gold-tin packaged diode laser bars[J]. SPIE,2006,6104: 610404.

[32] CRUMP P,WANG J,CRUM T,et al.. >360 W and >70% efficient GaAs-based diode Lasers[J]. SPIE,2005,5711: 21-29.

[33] ICHTENSTEIN N,MANZ Y,MAURON P,et al.. 325 Watt from 1-cm wide 9xx Laser bars for DPSSL- and FL-applications[J]. SPIE,2005,5711: 1-11.

[34] BRAUNSTEIN J,MIKULLA M,KIEFER R,et al.. 267 W cw A1GaAs/GaInAs diode laser bars[J]. SPIE,2000,3945: 17-22.

[35] MIYAJIMA H,KAN H,KANZAKI T,et al.. Jet-type, water-cooled heat sink that yields 255-W continuous-wave laser output at 808 nm from a 1-cm laser diode bar[J]. Opt. Lett.,2004,29(3): 304-306.

[36] CRUMP P,FREVERT C,BUGGE F,et al.. Progress in high-energy-class diode laser pump sources[J]. SPIE,2015,9348: 93480U.

[37] CRUMP P,FREVERT C,HOSLER H,et al.. Cryogenic ultra-high power infra-red diode laser bars[J]. SPIE,2014,9002: 90021I.

[38] CRUMP P,CKTERAI M,SCHULTZ C M,et al.. Studies of limitations to lateral brightness in high power diode lasers using spectrally-resolved mode profiles[C],IEEE International Semiconductor Laser Conference,Meli-Palas Atenea,Palma de Mallorca Spain,September 7-10,2014: 23-24.

[39] SVERDLOV B,PFEIFFER H U,ZIBIK E,et al.. Optimization of fiber coupling in ultra-high power pump modules at λ=980 nm[J]. SPIE,2013,8605: 860508.

[40] SMITH G M,DONNELLY J P,MISSAGGIA L J,et al.. Slab-coupled optical waveguide lasers and amplifiers[J]. SPIE,2012,8241: 82410S.

[41] DOGANA M,SMITHB G M,MISSAGGIA L J,et al.. Dense array slab-coupled optical waveguide laser capable of 500 W/bar[J]. SPIE,2014,8965: 89650L.

[42] FIEBIG C,BLUME G,KASPARI C,et al.. 12 W high-brightness single-frequency DBR tapered diode laser[J]. Electronics Lett.,2008,44(21): 1253-1255.

[43] REDMOND S M,CREEDON K J,KANSKY J E. Active coherent beam combining of diode lasers[J]. Opt. Lett.,2011,36(6): 999-1001.

[44] MISSAGGIA L J,REDMOND S M,BRATTAIN M A,et al.. Advanced packaging of high-power slab-coupled optical waveguide laser and amplifier arrays for coherent beam combining[C].CLEO,San Jose,CA,USA,May 16-21,2010: CThX4.

[45] HUANG R K,CHANNA B,MISSAGGIA L J,et al.. Coherently combined diode laser arrays and stacks[C]. CLEO/QELS,Baltimore,Maryland,USA,June 2-4,2009: CWF1.

[46] HEINEMANN S,LEWIS B,REGAARD B,et al.. Single emitter based diode lasers with high brightness, high power and narrow linewidth[J]. SPIE,2011,7918: 79180M.

[47] PRICE K,KARLSEN S,LEISHER P,et al.. High brightness fiber coupled pump laser development[J]. SPIE,2010,7583: 758308.

[48] DUESTERBERG R,XU L,SKIDMORE J A,et al.. 100 W High-brightness multi-emitter laser pump[J]. SPIE,2011. 7918: 79180V.

[49] GAPONTSEV V,MOSHEGOV N,TRUBENKO P,et al.. High-brightness 9XX-nm pumps with wavelength stabilization[J]. SPIE,2010,7583: 75830A.

[50] PIERER J,LUTZELSCHWAB M,GROSSMANN S,et al.. Automated assembly processes of high power single emitter diode lasers for 100 W in 105 μm/NA 0.15 fiber module[J]. SPIE,2011,7918: 79180I.

[51] SCHRODER D,WERNER E,FRANKE A,et al. Roadmap to low cost, high brightness diode laser power out of the fiber[J]. SPIE,2010,7583: 758309.

[52] werner m,wessling c,hengesbach s,et al.. 100 W/100 μm passively cooled, fiber coupled diode laser at 976 nm based on multiple 100 μm single emitters[J]. SPIE,2009,7198: 71980P.

[53] LIU R,JIANG X C,YANG T,et al.. High brightness 9xxnm fiber coupled diode lasers[J]. SPIE,2015,9348: 93480V.

[54] TIMMERMANN A,BARTOSCHEWSKI D,SCHLUTER S,et al.. Intensity increasing up to 4 MW/cm2 with BALBs via wavelengths coupling[J]. SPIE,2009,7198: 71980X.

[55] VOB M,MEINSCHIEN J,BRUNS P,et al.. High brightness fibre coupled diode lasers of up to 4-kW output power for material processing[J]. SPIE,2012,8241: 824103.

[56] WOLF P,KOHLER B,ROTTER K,et al.. High-power, high-brightness and low-weight fiber coupled diode laser device[J]. SPIE,2011,7918: 79180O.

[57] KOHLER B,SEGREF A,WOLF P,et al.. Multi-kW high-brightness fiber coupled diode laser[J]. SPIE,2013,8605: 86050B.

[58] STROHMAIER S,TILLKORN C,OLSCHOWSKY P,et al.. High-power, high- brightness direct-diode lasers[J]. Optics & Photonics News,2010,21(10): 25-29.

[59] LASERLINE[EB/OL].[2013-05-07]. http: //www.laserline.com.

[60] MALCHUS J,KRAUSE V,REHMANN G,et al.. A 40 kW fiber-coupled diode laser for material processing and pumping applications[J]. SPIE,2015,9348: 934803.

[61] MALCHUS J,KRAUSE V ,KOESTERS A,et al.. A 25 kW fiber-coupled diode laser for pumping applications[J]. SPIE,2014,8965: 89650B.

[62] MATTHEWS D G,KLEINE K,KRAUSE V,et al.. A 15 kW Fiber-coupled diode laser for pumping applications[J]. SPIE,2012,8241: 824103.

[63] 朱洪波, 张金胜,马军, 等.10 kW连续输出半导体激光熔覆光源[J].光学 精密工程, 2013, 21(4): 829-833.

    ZHU H B,ZHANG J SH,MA J,et al.. 10 kW CW diode laser cladding sources[J]. Opt. Precision Eng.,2013, 21(4): 829-833.(in Chinese)

[64] KELEMEN M T,WEBER J,KAUFEL G,et al.. Tapered diode lasers at 976 nm with 8 W nearly diffraction limited output power[J]. Electron. Lett.,2005,41,(18): 1011-1013.

[65] PASCHKE K,SUMPF B,DITTMAR F,et al.. Nearly-diffraction limited 980 nm tapered diode lasers with an output power of 7.7 W[J]. IEEE,2005,11: 1223-1227.

[66] DITTMAR F,SUMPF B,FRICKE J,et al.. High-power 808 nm tapered diode lasers with nearly diffraction-limited beam quality of M2=1.9 at P=4.4 W[J]. IEEE,2006,18: 601-603.

[67] HASLER K H,SUMPF B,ADAMIEC P,et al.. 5-W DBR tapered lasers emitting at 1060 nm with a narrow spectral linewidth and a nearly diffraction-limited beam quality[J]. IEEE,2008,20(19): 1648-1650.

[68] UNGER A,UTHOFF R,STOIBER M,et al.. Tailored bar concepts for 10 mm-mrad fiber coupled modules scalable to kW-class direct diode lasers[J]. SPIE,2015,9348: 934809.

[69] FRITSCHE H,KRUSCHE B,KOCH R,et al.. High brightness, direct diode laser with kW output power[J]. SPIE,2014,8965: 89650G.

[70] DIRECTPHOTONICS[EB/OL].[2014-06-07].http: //www.directphotonics.com.

[71] HENGESBACH S,KRAUCH N,HOLLY C,et al.. High-power dense wavelength division multiplexing of multimode diode laser radiation based on volume Bragg gratings[J]. Opt. Lett.,2013,38(16): 3154-3157.

[72] FRICKE J,CRUMP P,DECKER J,et al.. High-brilliance diode lasers with monolithically-integrated surface gratings as sources for spectral beam combining[C]. High Power Diode Lasers and Systems Conference,Coventry,United Kingdom,October 16-17,2013: 2-3.

[73] CHANN B,GOYAL A K,FAN T Y,et al.. Efficient, high-brightness wavelength-beam-combined commercial off-the-shelf diode stacks achieved by use of a wavelength-chirped volume Bragg grating[J]. Optics Lett.,2006,31(9): 1253-1255.

[74] ROH S D,GRASSO D M,SAMLL J A. Very high brightness, fiber coupled diode lasers[J]. SPIE,2009,7198: 71980Y.

[75] FARMER J N,LOWENTHAL D D,PIERCE J W. Incoherent beam combination of diode laser bars[C]. LEOS,San Fransisco,USA,November,8-11,1999: 796-797.

[76] DANEU V,SANCHEZ A,FAN T Y,et al.. Spectral beam combining of a broad-stripe diode laser array in an external cavity[J]. Opt. Lett.,2000,25(6): 405-407.

[77] CHANN B,HUANG R K,MISSAGGIA L J,et al.. Near-diffraction-limited diode laser arrays by wavelength beam combining[J]. Opt. Lett.,2005,30(16): 2104-2106.

[78] GOPINATH J T,CHANN B,FAN T Y,et al.. 1450-nm high-brightness wavelength-beam combined diode laser array[J]. Opt. Express,2008,16(13): 9405-9410.

[79] TERADIODE[EB/OL].[2013-07-05].http: //www.teradiode.com.

[80] HECHT J. Beam combining cranks up the power[J]. Laser Focus World,2012,48(6): 41-43.

[81] ZHANG J,PENG H Y,LIU Y,et al.. Fiber-coupled diode laser flexible processing source for metal sheet welding[J]. Chin. J. Lumin.,2012,33(8): 895-900.

[82] 张志军,刘云,缪国庆, 等.2 kW半导体激光加工光源[J].发光学报,2013,34(3): 334-339.

    ZHANG ZH J,LIU Y,MIAO G Q,et al.. The 2 kW Semiconductor laser processing light[J]. Chin. J. Lumin.,2013,34(3): 334-339.(in Chinese)

[83] ZHANG J, PENG H Y, FU X H,et al.. CW 50W, M2=10.9 Diode laser source by spectral beam combining based on a transmission grating[J]. Opt. Express,2013,2(3): 3627-3632.

[84] 彭航宇,张俊,付喜宏, 等.高效外腔反馈光谱合束半导体激光器阵列[J].中国激光, 2013,40(7): 0702015.

    PENG H Y,ZHANG J,FU X H. High-efficiency external cavity spectral-beam-combined diode laser array[J]. Chinese J. Lasers,2013,40(7): 0702015.(in Chinese)

[85] 张俊,彭航宇, 曹军胜, 等.970 nm百瓦级半导体激光外腔反馈光谱合束光源[J].光学学报,2013,33(11): 1114001.

    ZHANG J,PENG H Y,CAO J SH,et al.. 970 nm Hundred-watt level diode laser source by wavelength beam combining with external cavity feedback[J]. Acta Optica Sinica,2013,33(11): 1114001.(in Chinese)

[86] ZHANG J, PENG H Y, LIU Y,et al.. Hundred-watt diode laser source by spectral beam combining[J]. Laser Phys. Lett.,2014,11: 125803

王立军, 彭航宇, 张俊. 大功率半导体激光合束进展[J]. 中国光学, 2015, 8(4): 517. WANG Li-jun, PENG Hang-yu, ZHANG Jun. Advance on high power diode laser coupling[J]. Chinese Optics, 2015, 8(4): 517.

本文已被 33 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!