Formaldehyde gas sensor based on TiO<sub>2</sub> thin membrane integrated with nano silicon structure

ZHENG Xuan; MING An-jie; YE Li; CHEN Feng-hua; SUN Xi-long; LIU Wei-bing; LI Chao-bo; OU Wen; WANG Wei-bing; CHEN Da-peng

doi:doi:10.1007/s11801-016-5249-5

光电子快报（英文版）, 2016, 12 (4): 308, Published Online: Oct. 12, 2017

Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure

ZHENG Xuan ¹MING An-jie ^2,*YE Li ³CHEN Feng-hua ³SUN Xi-long ¹LIU Wei-bing ²LI Chao-bo ²OU Wen ²WANG Wei-bing ²CHEN Da-peng ²

Author Affiliations

¹ School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

² Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

³ Laboratory of Advanced Polymer Materials, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China

Figures & Tables

ZHENG Xuan, MING An-jie, YE Li, CHEN Feng-hua, SUN Xi-long, LIU Wei-bing, LI Chao-bo, OU Wen, WANG Wei-bing, CHEN Da-peng. Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure[J]. 光电子快报（英文版）, 2016, 12(4): 308.

Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure

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