研制了一台KrF大能量准分子激光器，激光器采用紧凑型Chang电极与紫外火花预电离的结合,实现了激活区大面积的均匀辉光放电，利用LC反转倍压以及一级磁脉冲压缩技术在放电电容上实现了峰值电压40 kV、脉冲上升时间约为100 ns的高压快脉冲激励。研究了工作气体含量对激光器能量输出的影响，在总气压3.3×105 Pa，F2/He,Kr,Ne体积分数比值为1.97∶3.18∶94.85，充电电压27 kV时，得到了738 mJ的单脉冲能量输出，激光近场光斑30 mm×14 mm，在充电电压23 kV时，全电效率最高，达到2.0%。

The KrF excimer laser was studied. The large area uniform glow discharge was realized by using compact Chang electrode combined with ultraviolet spark pre-ionization, and to provide high-voltage discharge with high rising edge, the laser described here used LC inversion and one-stage magnetic switch in excitation circuit. The influence of the laser pulse energy by the work gas content was studied, and in volume ratio of F2 / He∶Kr∶Ne = 1.97∶3.18∶94.85 gas mixture at the total gas pressure of 330 kPa, the cross section of the output beam was 30 mm×14 mm at 27 kV charging voltage. A maximum output energy of 738 mJ was obtained. And the maximal overall efficiency was up to 2.0% with the charging voltage up to 23 kV.