[1] Chu Chenfu, Lai Fang, Chu Jungtang, et al. Study of GaN light-emitting diodes fabricated by laser lift-off technique［J］. Journal of Applied Physics, 2004, 95(8): 3916-3922.

[2] Engelhart P, Harder N P, Grischke R, et al. Laser structuring for back junction silicon solar cells［J］. Progress in Photovoltaics: Research and Applications, 2007, 15(3): 237-243.

[3] Shibahara K, Eto T, Kurobe K. Merits of heat assist for melt laser annealing［J］. IEEE Transactions on Electron Devices, 2006, 53(5): 1059-1064.

[4] Nodomi R, Oeda Y, Sajiki K, et al. High repetition rate, wide-aperture KrF lasers for subpicosecond amplification［J］. IEEE Journal of Quantum Electronics, 1991, 27(3): 441-447.

[5] Zhupikov A A, Razhev A M. Excimer KrF laser with He buffer gas, 0.8 J energy, and 2% efficiency［J］. Quantum Electronics, 1998, 28(8): 667-669.

[6] Bagayev S N, Razhev A M, Zhupikov A A, et al. 1.3 J KrF excimer laser with 2.5% efficiency［C］//ⅩⅣ International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers. 2003: 231-235.

[7] 王效顺, 余吟山, 王庆胜, 等. 高效率放电抽运 KrF 准分子激光器［J］. 中国激光, 2011, 38(1): 1-5.( Wang Xiaoshun, Yu Yinshan, Wang Qingsheng, et al. A discharge pumped KrF exicmer laser with high efficiency. Chinese Journal of Lasers, 2011, 38(1) :1-5)

[8] Chang T Y. Improved uniform-field electrode profiles for TEA laser and high-voltage applications［J］. Rev Sci Instrum, 1973, 44(4): 405-407.

[9] 楼祺洪. 脉冲放电气体激光器［M］.北京：科学出版社, 1993:63-64.( Lou Qihong. Pulsed gas-discharge lasers. Beijing: Science Press, 1993:63-64)

[10] 游利兵, 梁勖, 余吟山. 固体开关小能量准分子激光器的设计与实验研究［J］.中国激光, 2010, 37(2): 370-373.(You Libing, Liang Xu, Yu Yinshang. Design and experimental study of an excimer laser based on solid state pulsed power module. Chinese Journal of Lasers, 2010, 37(2):370-373)

[11] Partlo W N, Sandstrom R L, Fomenkov I V, et al. Low cost of ownership KrF excimer laser using a novel pulse power and chamber configuration［C］//Proc of SPIE.1995: 90-100.

[12] 游利兵, 梁勖, 余吟山, 等. 准分子激光全固态脉冲电源设计与实验研究［J］.强激光与粒子束, 2009, 21(11): 1750-1754.(You Libing, Liang Xu, Yu Yinshang, et al. Design and experimental study of all solid state pulse power module for excimer lasers. High Power Laser and Particle Beams, 2009, 21(11):1750-1754)

[13] 王庆胜, 游利兵, 余吟山, 等. 基于全固态脉冲功率技术的kHz准分子激光器激励源［J］.强激光与粒子束, 2013, 25(4): 885-889.(Wang Qingsheng, You Libing, Yu Yinshan, et al. All solid state pulse module for kHz excimer laser. High Power Laser and Particle Beams, 2013,25(4): 885-889)

[14] Basting D, Marowsky G. Excimer laser technology［M］. Berlin: Springer Verlag, 2005:43-44.

[15] 刘晶儒.准分子激光技术及应用［M］.北京：国防工业出版社,2009:75-77.(Liu Jingru. Excimer laser technology and applications. Beijing: National Defense Industry Press,2009:75-77)