基于俯视SEM图像的矩形光栅占宽比检测方法
吴丽翔, 刘颖, 饶欢乐, 邱克强, 付绍军. 基于俯视SEM图像的矩形光栅占宽比检测方法[J]. 应用光学, 2014, 35(3): 446.
WU Li-xiang, LIU Ying, RAO Huan-le, QIU Ke-qiang, FU Shao-jun. Measurement method for duty cycles of rectangular gratings based on top-down SEM images[J]. Journal of Applied Optics, 2014, 35(3): 446.
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吴丽翔, 刘颖, 饶欢乐, 邱克强, 付绍军. 基于俯视SEM图像的矩形光栅占宽比检测方法[J]. 应用光学, 2014, 35(3): 446. WU Li-xiang, LIU Ying, RAO Huan-le, QIU Ke-qiang, FU Shao-jun. Measurement method for duty cycles of rectangular gratings based on top-down SEM images[J]. Journal of Applied Optics, 2014, 35(3): 446.
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