激光与光电子学进展, 2018, 55 (4): 041401, 网络出版: 2018-09-11 复制并引用该论文  本文已被引 1 次  被引通知

图 & 表

图 1. 激光加工光路系统示意图

Fig. 1. Optical system diagram for laser processing

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图 2. 激光加工中常用的扩束镜。(a)开普勒式系统;(b)伽利略式系统

Fig. 2. Beam expanders commonly used in laser processing. (a) Kepler system; (b) Galileo system

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图 3. 序列模式下的光路系统示意图

Fig. 3. Schematic of optical system with sequence mode

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图 4. 非序列模式下的光路系统示意图

Fig. 4. Diagram of optical system with non-sequence mode

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图 5. 离焦量随扩束镜镜间距的变化

Fig. 5. Relationship between defocusing amount and distance between beam expanders

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图 6. 扩束镜倾斜角示意图

Fig. 6. Schematic of tilt angle of beam expander

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图 7. 焦距、离焦量与扩束镜倾斜度的关系

Fig. 7. Relationship among focal length, defocusing amount and tilt angle of beam expander

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图 8. 峰值功率、光斑直径与扩束镜镜间距变化量的关系

Fig. 8. Relationship among peak power, spot diameter and distance between beam expanders

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图 9. 峰值功率、光斑直径与扩束镜偏转角度的关系

Fig. 9. Relationship among peak power, spot diameter and tilt angle of beam expander

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图 10. (a)不同镜间距下工作面光斑能量分布;(b)不同倾斜度下工作面光斑能量分布;(c)光斑中心位置与扩束镜倾斜度的关系

Fig. 10. (a) Distribution of spot energy at different lens distances; (b) distribution of spot energy at different tilt angles; (c) relationship between spot center position and tilt angle of beam expander

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图 11. (a)测量焦点位置实验装置示意图;(b)测量方法示意图;(c)实验测得离焦量与镜间距变化量的关系

Fig. 11. (a) Schematic of experimental setup for measuring focus position; (b) schematic of measuring method; (c) relationship between defocusing amount and lens distance measured in experiment

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图 12. 测量光斑能量分布实验装置示意图

Fig. 12. Schematic of experimental setup for measuring spot energy distribution

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图 13. 不同镜间距下光斑能量分布。(a) Δd=1.0 mm;(b) Δd=0.2 mm;(c) Δd=-0.2 mm;(d) Δd=-1.0 mm

Fig. 13. Distributions of spot energy under different lens distances. (a) Δd=1.0 mm; (b) Δd=0.2 mm; (c) Δd=-0.2 mm; (d) Δd=-1.0 mm

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表 1序列模式下的光路系统参数

Table1. Parameters of optical system with sequence mode

Surface Radius /mm Thickness /mm Glass Semi-diameter /mm OBJ Infinity Infinity - 0.000 STO Infinity 5.000 - 2.500 2 -3.800 5.200 N-BK7 3.500 3 -10.450 26.100 - 5.000 4 50.600 5.100 N-BK7 12.500 5 -50.600 50.000 - 12.500 6 Infinity 50.000 - 10.868 7 61.026 7.500 BK7 15.000 8 -44.842 2.500 SF5 15.000 9 -131.726 95.726 - 15.000 Image Infinity - - 9.826

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表 2非序列模式下的光路系统参数

Table2. Parameters of optical system with non-sequential mode

Item Object type Reference object zposition Material 1 Source Gaussian 0 0 - 2 Detector rect 0 5.000 - 3 Standard lens 2 10.000 N-BK7 4 Standard lens 3 31.300 N-BK7 5 Detector rect 4 55.100 - 6 Standard lens 5 50.000 BK7 7 Standard lens 6 7.500 SF5 8 Detector rect 7 98.226 -

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表 3非序列模式下改变扩束镜倾角时各元件的参数

Table3. Parameters of optical system with non-sequential mode when lens tilt angle is changed

Item Object type Reference object zposition Tilt angle /(°) 1 Source Gaussian 0 0 0 2 Detector rect 0 5.000 0 3 Standard lens 0 15.000 5 4 Standard lens 0 46.300 0 5 Detector rect 0 101.400 0 6 Standard lens 0 151.400 0 7 Standard lens 0 158.900 0 8 Detector rect 0 257.126 0

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表 4初始位置光斑能量分布情况(滤波后)

Table4. Spot energy distributions in initial position (after filtering)

Detector Spot distribution on xy plane Spot distribution onx-axis (or y-axis) Stereogram of distributionof spot irradiance 2(10 mm×10 mm) 5(30 mm×30 mm) 8(4 mm×4 mm)

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杨亮亮, 张珞, 朱海红, 殷杰, 柯林达, 曾晓雁. 扩束镜镜间距和倾斜度对激光聚焦特性的影响[J]. 激光与光电子学进展, 2018, 55(4): 041401. Liangliang Yang, Luo Zhang, Haihong Zhu, Jie Yin, Linda Ke, Xiaoyan Zeng. Influences of Lens Distance and Tilt Angle Between Beam Expanders on Laser Focusing Characteristics[J]. Laser & Optoelectronics Progress, 2018, 55(4): 041401.