CCD多晶硅层间复合绝缘介质研究
廖乃镘, 刘昌林, 张明丹, 寇琳来, 罗春林, 阙蔺兰. CCD多晶硅层间复合绝缘介质研究[J]. 半导体光电, 2019, 40(4): 455.
LIAO Naiman, LIU Changlin, ZhANG Mingdan, KOU Linlai, LUO Chunlin, QUE Linlan. Study on Inter-layer Insulating Dielectric of Polysilicon of Charge-coupled Devices[J]. Semiconductor Optoelectronics, 2019, 40(4): 455.
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廖乃镘, 刘昌林, 张明丹, 寇琳来, 罗春林, 阙蔺兰. CCD多晶硅层间复合绝缘介质研究[J]. 半导体光电, 2019, 40(4): 455. LIAO Naiman, LIU Changlin, ZhANG Mingdan, KOU Linlai, LUO Chunlin, QUE Linlan. Study on Inter-layer Insulating Dielectric of Polysilicon of Charge-coupled Devices[J]. Semiconductor Optoelectronics, 2019, 40(4): 455.
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