采用飞行时间谱技术,测量了准分子激光烧蚀沉积高温超导薄膜过程中,由靶面出射粒子的飞行速度。研究了粒子速度与充氧压及其激光能量密度的关系。讨论了高能粒子在薄膜原位低温外延生长中的作用。

The time of flight spectra technique was adopted to measure the velocities of ejected particals from the target surface during the process of laser deposition of high To superconducting film. The dependence of velocities on oxygen pressure and laser energy density was studied. The mechanism of producing high energy particala and its relevance to the thin film formation is discussed.