光学学报, 1991, 11 (7): 598, 网络出版: 2007-11-12
激光沉积超导薄膜过程中出射粒子速度的飞行时间谱分析
The time of flight spectra analysis of ejected partical velocities during laser deposition of high Tc superconducting film
摘要
采用飞行时间谱技术,测量了准分子激光烧蚀沉积高温超导薄膜过程中,由靶面出射粒子的飞行速度。研究了粒子速度与充氧压及其激光能量密度的关系。讨论了高能粒子在薄膜原位低温外延生长中的作用。
Abstract
The time of flight spectra technique was adopted to measure the velocities of ejected particals from the target surface during the process of laser deposition of high To superconducting film. The dependence of velocities on oxygen pressure and laser energy density was studied. The mechanism of producing high energy particala and its relevance to the thin film formation is discussed.
参考文献
范永昌, 安承武, 宁波, 陆冬生, 李再光. 激光沉积超导薄膜过程中出射粒子速度的飞行时间谱分析[J]. 光学学报, 1991, 11(7): 598. 范永昌, 安承武, 宁波, 陆冬生, 李再光. The time of flight spectra analysis of ejected partical velocities during laser deposition of high Tc superconducting film[J]. Acta Optica Sinica, 1991, 11(7): 598.