Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam

Zhi Luo; Cong Wang; Xinran Dong; Ji’an Duan

doi:doi:10.3788/COL201816.031401

Chinese Optics Letters, 2018, 16 (3): 031401, Published Online: Jul. 13, 2018

Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam Download： 741次

Zhi Luo Cong Wang Xinran Dong ^*Ji’an Duan ^**

Author Affiliations

State Key Laboratory of High Performance and Complex Manufacturing, Central South University, Changsha 410083, China

Figures & Tables

Fig. 1. (a) Geometrical evolution from a Gaussian beam to a donut-shaped beam. (b),(d) The top view and side view of a beam focused by a cylindrical lens. (c),(e) The top view and side view of a donut-shaped beam formed with an axicon.

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Fig. 2. CLSM images of fs laser fabrication by (a) an axicon-generated donut-shaped beam and (b) a cylindrical directly focused beam. (c),(d) The corresponding cross-sectional profiles.

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Fig. 3. Donut-shaped beam polished surfaces with different scanning speeds. (a) 0.1 mm/s, (b) 0.2 mm/s, (c) 0.4 mm/s, (d) 0.6 mm/s, (e) 0.8 mm/s, (f) 1.0 mm/s, (g) 1.2 mm/s, and (h) 1.4 mm/s.

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Fig. 4. Influence of (a) the scanning speed and the laser pulse energy, and (b) the scanning times on the roughness of processed surfaces by the donut-shaped beam.

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Fig. 5. Relationship between the scanning width and the relative distance from the lens to the objective.

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Zhi Luo, Cong Wang, Xinran Dong, Ji’an Duan. Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam[J]. Chinese Optics Letters, 2018, 16(3): 031401.

Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam Download： 741次

Fig. 1. (a) Geometrical evolution from a Gaussian beam to a donut-shaped beam. (b),(d) The top view and side view of a beam focused by a cylindrical lens. (c),(e) The top view and side view of a donut-shaped beam formed with an axicon.

Fig. 2. CLSM images of fs laser fabrication by (a) an axicon-generated donut-shaped beam and (b) a cylindrical directly focused beam. (c),(d) The corresponding cross-sectional profiles.

Fig. 3. Donut-shaped beam polished surfaces with different scanning speeds. (a) 0.1 mm/s, (b) 0.2 mm/s, (c) 0.4 mm/s, (d) 0.6 mm/s, (e) 0.8 mm/s, (f) 1.0 mm/s, (g) 1.2 mm/s, and (h) 1.4 mm/s.

Fig. 4. Influence of (a) the scanning speed and the laser pulse energy, and (b) the scanning times on the roughness of processed surfaces by the donut-shaped beam.

Fig. 5. Relationship between the scanning width and the relative distance from the lens to the objective.

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Femtosecond laser highly-efficient plane processing based on an axicon-generated donut-shaped beam Download： 741次

Fig. 1. (a) Geometrical evolution from a Gaussian beam to a donut-shaped beam. (b),(d) The top view and side view of a beam focused by a cylindrical lens. (c),(e) The top view and side view of a donut-shaped beam formed with an axicon.

Fig. 2. CLSM images of fs laser fabrication by (a) an axicon-generated donut-shaped beam and (b) a cylindrical directly focused beam. (c),(d) The corresponding cross-sectional profiles.

Fig. 3. Donut-shaped beam polished surfaces with different scanning speeds. (a) 0.1 mm/s, (b) 0.2 mm/s, (c) 0.4 mm/s, (d) 0.6 mm/s, (e) 0.8 mm/s, (f) 1.0 mm/s, (g) 1.2 mm/s, and (h) 1.4 mm/s.

Fig. 4. Influence of (a) the scanning speed and the laser pulse energy, and (b) the scanning times on the roughness of processed surfaces by the donut-shaped beam.

Fig. 5. Relationship between the scanning width and the relative distance from the lens to the objective.

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