半导体光子学与技术, 1996, 2 (1): 61, 网络出版: 2011-08-02
Fabrication of Silicon Microlens Arrays Using Ion Beam Milling
Fabrication of Silicon Microlens Arrays Using Ion Beam Milling
补充材料
MAI Zhihong, YI Xingjian, ZHAO Xinrong. Fabrication of Silicon Microlens Arrays Using Ion Beam Milling[J]. 半导体光子学与技术, 1996, 2(1): 61. MAI Zhihong, YI Xingjian, ZHAO Xinrong. Fabrication of Silicon Microlens Arrays Using Ion Beam Milling[J]. Semiconductor Photonics and Technology, 1996, 2(1): 61.