半导体光子学与技术, 1996, 2 (1): 61, 网络出版: 2011-08-02 复制并引用该论文  被引通知

MAI Zhihong, YI Xingjian, ZHAO Xinrong. Fabrication of Silicon Microlens Arrays Using Ion Beam Milling[J]. 半导体光子学与技术, 1996, 2(1): 61. MAI Zhihong, YI Xingjian, ZHAO Xinrong. Fabrication of Silicon Microlens Arrays Using Ion Beam Milling[J]. Semiconductor Photonics and Technology, 1996, 2(1): 61.