一种具有衬底温度补偿功能的非制冷红外读出电路

周云; 吕坚; 廖宝斌; 蒋亚东

doi:doi:10.3724/sp.j.1010.2013.00248

红外与毫米波学报, 2013, 32 (3): 248, 网络出版: 2013-06-25

一种具有衬底温度补偿功能的非制冷红外读出电路

An uncooled infrared readout circuit with substrate temperature compensation

论文大纲

周云 ^*吕坚廖宝斌蒋亚东

作者单位

电子科技大学电子薄膜与集成器件国家重点实验室, 四川成都610054

非制冷微测辐射热计热电制冷器(TEC) 读出电路(ROIC) uncooled microbolometer TEC ROIC

摘要

针对非制冷红外探测器系统，设计了一种无需衬底温度稳定器——热电制冷器(TEC)的读出电路(ROIC)结构.首先分析了衬底温度对微测辐射热计的特性的影响，利用ROIC对衬底温度变化引起的微测辐射热计的特性的变化进行补偿，实现ROIC的输出信号与衬底无关.该ROIC已在0.5 μm CMOS工艺下成功流片，并应用了到阵列大小为320×240的非制冷微测辐射热计焦平面上.测试结果表明: 在衬底温度变化20 K时，ROIC输出信号仅变化2 mV，实现了去除TEC后衬底温度补偿的功能，有效地降低了系统功耗.该ROIC在低功耗，小体积的非制冷红外探测器上有着广泛的应用.

Abstract

A new read-out IC (ROIC) architecture with substrate temperature compensation was introduced for the uncooled microbolometer detector. The influence of responsivity on the substrate temperature was evaluated. Numerical simulation and measurement of the proposed ROIC architecture demonstrated high quality of signal over wide temperature range without using multiple corrections. A 320×240 uncooled microbolometer focal plane array(FPA) based on the proposed circuit was implemented on silicon using a 0.5 μm CMOS technology. The measurement data show that the maximum difference of the output voltages is only 2mV over the change of 20K in the substrate temperature. This architecture is expected to allow removal of the thermoelectric cooler (TEC) from uncooled systems. Thus it is ideally suited for low-cost, low-power, and low-weight production applications.

参考文献

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周云, 吕坚, 廖宝斌, 蒋亚东. 一种具有衬底温度补偿功能的非制冷红外读出电路[J]. 红外与毫米波学报, 2013, 32(3): 248. ZHOU Yun, LV Jian, LIAO Bao-Bin, JIANG Ya-Dong. An uncooled infrared readout circuit with substrate temperature compensation[J]. Journal of Infrared and Millimeter Waves, 2013, 32(3): 248.

一种具有衬底温度补偿功能的非制冷红外读出电路

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