激光与光电子学进展, 2017, 54 (6): 061202, 网络出版: 2017-06-08
白光干涉轮廓仪空间扫描范围自适应规划方法
Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler
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马龙, 吕毅, 裴昕, 焦智超, 张鸿燕, 胡艳敏. 白光干涉轮廓仪空间扫描范围自适应规划方法[J]. 激光与光电子学进展, 2017, 54(6): 061202.
Ma Long, Lü Yi, Pei Xin, Jiao Zhichao, Zhang Hongyan, Hu Yanmin. Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler[J]. Laser & Optoelectronics Progress, 2017, 54(6): 061202.
马龙, 吕毅, 裴昕, 焦智超, 张鸿燕, 胡艳敏. 白光干涉轮廓仪空间扫描范围自适应规划方法[J]. 激光与光电子学进展, 2017, 54(6): 061202. Ma Long, Lü Yi, Pei Xin, Jiao Zhichao, Zhang Hongyan, Hu Yanmin. Adaptive Planning Method of Spatial Scanning Range for White Light Interferometric Profiler[J]. Laser & Optoelectronics Progress, 2017, 54(6): 061202.
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