激光与光电子学进展, 2021, 58 (3): 0314002, 网络出版: 2021-03-12
对基于时空干涉的空间整形的畸变与光强校正
Distortion and Light Intensity Correction for Spatiotemporal-Interference-Based Spatial Shaping
图 & 表
图 1. 基于时空干涉的飞秒激光整形实验装置
Fig. 1. Experimental setup of spatiotemporal-interference-based femtosecond laser shaping
图 2. 模拟结果。(a) l-q(l)相对畸变拟合曲线；(b)(c)畸变校正前后的网格状相位全息图；(d)(e)在SLM上加载(b)和(c)图时模拟得到的样品处的光强分布
Fig. 2. Simulation results. (a) Relative distortion fitting curve of l-q(l); (b)(c) gridded phase holograms before and after distortion correction, respectively; (d)(e) distribution of irradiance at the simulated sample when Figs. (b) and (c) are loaded on SLM
图 3. 对圆形光场缩束后的相对光强分布Gauss Amp拟合曲线
Fig. 3. Gauss Amp fitting curve for relative light intensity distribution of circular light field after the contraction
图 4. 模拟结果。(a)(d)光强校正前后的圆形相位全息图；(b)(c)在SLM上加载(a)图时的二维和一维的模拟光强分布，总功率为1.619×10-1 W；(e)(f)在SLM上加载(d)图时的二维和一维的模拟光强分布，总功率为1.352×10-1 W
Fig. 4. Simulation results. (a)(d) Circular phase holograms before and after light-intensity correction; (b)(c) two-dimensional and one-dimensional simulated light intensity distributions when loading Fig. (a) on SLM, total power is 1.619×10-1 W; (e)(f) two-dimensional and one-dimensional simulated light intensity distributions when loading Fig. (d) on SLM, total power is 1.352×10-1 W
图 5. 模拟结果。(a)(d)畸变与光强校正前后的条状相位全息图；(b)(c)在SLM上加载(a)图后的二维和一维的模拟光强分布，总功率为6.995×10-2W；(e)(f)在SLM上加载(d)图后的二维和一维的模拟光强分布，总功率为5.073×10-2 W；(g)(h)加载(a)或(d)图时，不锈钢表面加工的图形
Fig. 5. Simulation result. (a)(d) Striped phase holograms before and after distortion and light-intensity correction; (b)(c) two-dimensional and one-dimensional simulated light intensity distributions when loading Fig. (a) on SLM, total power is 6.995×10-2 W; (e)(f) two-dimensional and one-dimensional simulated light intensity distributions when loading Fig. (d) on SLM, total power is 5.073×10-2 W; (g)(h) stainless steel surface processing images，when loading Fig. (a) or (d)
图 6. 校正前后激光加工图案边缘图像。(a)校正前；(b)校正后
Fig. 6. Edge images of laser processing results before and after correction. (a)Before correction; (b)after correction
图 7. 在500 μm厚硅片上通过拼接加工而成的长条纹结构
Fig. 7. Long stripe structure on a 500 μm thick silicon formed by stitching
图 8. 模拟结果。(a)(b)加工二维码单个像素时的两种相位全息图；(c)在SLM上加载(a)图后的二维模拟光强分布，峰值光强为2.077×103 W/cm2；(d)不锈钢表面二维码结构全貌；(e)二维码结构放大观测图
Fig. 8. Simulation results. (a)(b) Two phase holograms when processing a single pixel of a QR code; (c) two-dimensional simulated light intensity distributions when loading Fig. (a) on SLM, peak irradiance is 2.077×103 W/cm2; (d) QR code structure on stainless steel surface; (e) zoom in the view of the QR code structure
图 9. 观测结果。(a)二维码结构内的LIPSS图像；(b)测量LIPSS条纹周期图例
Fig. 9. Observation results. (a)LIPSS image inside QR code structure; (b)legend for measuring the LIPSS cycle
图 10. 图10对二维码结构色的观测方法图例
Fig. 10. Schematic of observation method for the QR code structural color
表 1对圆形光场缩束后的相对光强分布Gauss Amp拟合所得解与其标准差
Table1. Gauss Amp fitting solution and its standard deviation for relative light intensity distribution of circular light field after the contraction
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林御寒, 石惠, 贾天卿. 对基于时空干涉的空间整形的畸变与光强校正[J]. 激光与光电子学进展, 2021, 58(3): 0314002. Lin Yuhan, Shi Hui, Jia Tianqing. Distortion and Light Intensity Correction for Spatiotemporal-Interference-Based Spatial Shaping[J]. Laser & Optoelectronics Progress, 2021, 58(3): 0314002.
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