红外技术, 2018, 40 (7): 701, 网络出版: 2018-08-04  

位测量轮廓术中相位-高度映射系统标定的研究现状

Research Status of Phase-Height Mapping System Calibration in Phase Measurement Profilometry
作者单位
1 苏州大学物理与光电·能源学部,江苏 苏州 215006
2 朝阳广播电视大学,辽宁 朝阳 122000
引用该论文

万安军, 林玉明, 赵勋杰. 位测量轮廓术中相位-高度映射系统标定的研究现状[J]. 红外技术, 2018, 40(7): 701.

WAN Anjun, LIN Yuming, ZHAO Xunjie. Research Status of Phase-Height Mapping System Calibration in Phase Measurement Profilometry[J]. Infrared Technology, 2018, 40(7): 701.

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万安军, 林玉明, 赵勋杰. 位测量轮廓术中相位-高度映射系统标定的研究现状[J]. 红外技术, 2018, 40(7): 701. WAN Anjun, LIN Yuming, ZHAO Xunjie. Research Status of Phase-Height Mapping System Calibration in Phase Measurement Profilometry[J]. Infrared Technology, 2018, 40(7): 701.

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