强激光与粒子束, 2010, 22 (2): 319, 网络出版: 2010-05-28  

被动半刚性磨盘在平滑中频误差中的应用

Research on mid-frequency errors smoothing with a passive semi-rigid lap
作者单位
1 中国科学院 光电技术研究所,成都 610209
2 中国科学院 研究生院,北京100039
摘要
介绍了一种去除中频误差的有效工具被动半刚性磨盘。被动半刚性磨盘由刚性基底、变形层、薄板层以及抛光层组成。这种特殊的夹层式结构使磨盘在平滑过程中具有高通滤波特性,因而能够有效去除中频误差。基于弹性力学和滤波器理论,分析了被动半钢性磨盘的平滑机理,讨论了磨盘基本参数和误差频率之间的相互关系。以一块表面具有明显中频误差的抛物面镜为实验件,对被动半刚性磨盘的平滑能力进行验证,经过2个周期(共计75 min)的平滑后,中频误差得到了有效抑制。
Abstract
Mast aspheric optical elements fabricated using computer controlled optical surfacing (CCOS) technology have mid-frequency errors on their surfaces. These errors come about because of the small tools removal characteristic and the misfit between rigid tools and aspheric surface. A passive semi-rigid tool,which can smooth ripple errors efficiently,is introduced in this paper. The tool is composed of a rigid layer,a compliant layer and a polishing layer. The passive tool works like a high-pass filter,smoothing the ripple out without damaging the surface figure. The expression of polishing pressure under the lap is deduced based on elastic plate theory. The relationship between the basic parameters of the lap and error frequency is also discussed. To testify the smoothing ability of the passive lap,a 418 mm,f/2 concave paraboloidal mirror is fabricated with small rigid tools. After two cycles (75 min),most of the mid-frequency errors are smoothed out.
参考文献

[1] 张蓉竹. ICF系统光学元件高精度波前检测技术研究[D].成都: 四川大学,2003: 21-31.(Zhang Rongzhu. Studies on high-accuracy wavefront test techniques of optical components in ICF. Chengdu: Sichuan University,2003: 21-31)

[2] 余景池,张学军,孙侠菲,等. 计算机控制光学表面成型技术综述[J]. 光学技术,1998,5(3):6-8. (Yu Jingchi,Zhang Xuejun,Sun Xiafei,et al. On the technology of computer controlled optical surfacing. Optical Technology,1998,5(3): 6-8)

[3] Kim S W,Jee M K. Evolution of surface characteristics in material removal simulation with sub-aperture tools[C]//Proc of SPIE. 2002,4411: 112-119.

[4] Jones R A. Computer simulation of smoothing during computer-controlled optical polishing[J]. Appl Opt,1995,34(7): 1162-1169.

[5] Michael T T,James H B,Anderson B. Aspheric optics: smoothing the ripples with semi-flexible tools[J]. Opt Eng,2002,41(7): 1473-1474.

[6] Burge J H,Anderson B,Benjamin S,et al. Development of optimal grinding and polishing tools for aspheric surfaces[C]//Proc of SPIE. 2001,4451: 153-164.

[7] Mehta P K,Hufnagel R E. Pressure distribution under flexible polishing tools.1-Conventional aspheric optics[C]//Proc of SPIE. 1990,1303: 178-188.

[8] 苗天德,程肠钧. 关于弹性板弯曲变形的Reissner理论[J]. 应用数学和力学,1980,1(2):221-235. (Miao Tiande,Cheng Changjun. On the Reissner theory of bending of an elastic plate. Applied Mathematics and Mechanics,1980,1(2): 221-235)

[9] Mehta P K,Reid P B. A mathematical model for optical smoothing prediction of high-spatial frequency surface errors[C]//Proc of SPIE. 1999,3786: 447-459.

[10] 徐之纶. 弹性力学[M]. 北京:人民教育出版社,1979. (Xu Zhilun. Elasticity. Beijing: People’s Education Press,1979)

[11] Simon H,Barry V V. Signals and Systems[M]. Beijing: Publishing House of Electronics Industry,2004

汉语, 伍凡, 万勇建, 房凯. 被动半刚性磨盘在平滑中频误差中的应用[J]. 强激光与粒子束, 2010, 22(2): 319. Han Yu, Wu Fan, Wan YongJian, Fang Kai. Research on mid-frequency errors smoothing with a passive semi-rigid lap[J]. High Power Laser and Particle Beams, 2010, 22(2): 319.

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