红外与激光工程, 2017, 46 (8): 0821002, 网络出版: 2017-11-07   

高掺铒硅基氧化钽脊形光波导

Silicon-based tantalum pentoxide ridge waveguide with high erbium concentration
作者单位
1 天津大学 精密仪器与光电子工程学院, 天津 300072
2 天津科技大学 应用文理学院, 天津 300457
引用该论文

陈朝夕, 温浩康, 于浩, 李彬, 胡军, 郭天娥, 马小玲, 华平壤. 高掺铒硅基氧化钽脊形光波导[J]. 红外与激光工程, 2017, 46(8): 0821002.

Chen Zhaoxi, Wen Haokang, Yu Hao, Li Bin, Hu Jun, Guo Tian′e, Ma Xiaoling, Hua Pingrang. Silicon-based tantalum pentoxide ridge waveguide with high erbium concentration[J]. Infrared and Laser Engineering, 2017, 46(8): 0821002.

参考文献

[1] He Q, Ming M, Wei C, et al. Mesoporous carbon@silicon-silica nanotheranostics for synchronous delivery of insoluble drugs and luminescence imaging[J]. Biomaterials, 2012, 33(33): 4392-4402.

[2] Selvaraja S K, Sleeckx E, Schaekers M, et al. Low-loss amorphous silicon-on-insulator technology for photonic integrated circuitry[J]. Optics Communications, 2009, 282(9): 1767-1770.

[3] Delheke D, Stihramanian A Z, Cardile P, et al. Silicon photonics for on-chip spectrophotometry[C]//IEEE International Conference on Group IV Photonics, 2015: 191-192.

[4] 王巍, 冯其, 武逶, 等. 硅基APD器件的工艺及性能仿真分析[J]. 红外与激光工程, 2014, 43(1): 140-144.

    . Wang Wei, Feng Qi, Wu Wei, et al. Analysis and simulation of process and performance of silicon avalanche photodiode [J]. Infrared and Laser Engineering, 2014, 43(1): 140-144. (in Chinese)

[5] Cava R F, Peck W F, Krajewski J J. Enhancement of the dielectric constant of Ta2O5 through substitution with TiO2[J]. Nature, 1995, 377(6546):215-217.

[6] 张乾, 焦宏飞, 程鑫彬,等. 几种紫外薄膜材料的光学及损伤特性分析[J]. 红外与激光工程, 2014, 43(4): 1230-1234.

    Zhang Qian, Jiao Hongfei, Cheng Xinbin, et al. Analysis of optical and damage properties for several ultraviolet thin film materials [J]. Infrared and Laser Engineering, 2014, 43(4):1230-1234. (in Chinese)

[7] Donkov N, Mateev E, Safonov V, et al. Comparative analysis of electrophysical properties of ceramic tantalum pentoxide coatings, deposited by electron beam evaporation and magnetron sputtering methods[J]. Journal of Physics, 2004, 558: 012036.

[8] Rabiei P, Ma J, Khan S, et al. Heterogeneous lithium niobate photonics on silicon substrates.[J]. Optics Express, 2013, 21(21): 25573-25581.

[9] Rabiei P, Ma J, Khan S, et al. Submicron optical waveguides and microring resonators fabricated by selective oxidation of tantalum.[J]. Optics Express, 2013, 21(6):6967-6972.

[10] 谭娜. 晶体结构对Er/Yb共掺TiO2薄膜荧光光谱的影响[J]. 真空科学与技术学报, 2013, 33(3): 249-252.

    Tan Na. Influence of phase structure on photoluminescence spectrum of Er/Yb co-doped TiO2 films [J]. Chinese Journal of Vacuum Science and Technology, 2013, 33(3):249-252. (in Chinese)

[11] 潘瑞琨, 章天金, 严小黑, 等. 光波导放大器用材料的研究进展[J]. 材料导报, 2005, 19(11): 28-30.

    Pan Ruikun, Zhang Tianjin, Yan Xiaohei, et al. Advances in research on the materials of optical waveguide amplifier [J]. Materials Review, 2005, 19(11): 28-30. (in Chinese)

[12] Subramanian A Z, Murugan G S, Zervas M N, et al. Spectroscopy, modeling, and performance of Erbium-doped Ta2O5, waveguide amplifiers[J]. Journal of Lightwave Technology, 2012, 30(10): 1455-1462.

陈朝夕, 温浩康, 于浩, 李彬, 胡军, 郭天娥, 马小玲, 华平壤. 高掺铒硅基氧化钽脊形光波导[J]. 红外与激光工程, 2017, 46(8): 0821002. Chen Zhaoxi, Wen Haokang, Yu Hao, Li Bin, Hu Jun, Guo Tian′e, Ma Xiaoling, Hua Pingrang. Silicon-based tantalum pentoxide ridge waveguide with high erbium concentration[J]. Infrared and Laser Engineering, 2017, 46(8): 0821002.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!