高衍射效率短波红外凸面闪耀光栅的研制与应用 
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Development and Application of Shortwave Infrared Convex Blazed Grating with High Diffraction Efficiency
1 南京航空航天大学自动化学院, 江苏 南京 211100
2 中国地质调查局南京地质调查中心, 江苏 南京 210016
3 江苏三深光谱感知技术研究院有限公司, 江苏 南京 211135
图 & 表
图 1. Offner成像光谱仪示意图
Fig. 1. Diagram of Offner imaging spectrometer
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图 2. 闪耀光栅结构示意图
Fig. 2. Schematic of blazed grating
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图 3. Lamina槽型光栅的结构
Fig. 3. Structure of Lamina groove grating
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图 4. 矩形槽型凸面光栅的衍射效率仿真曲线。(a)不同槽深下;(b)不同波长下
Fig. 4. Simulation curves of diffraction efficiency of rectangular groove convex grating. (a) Under different groove depths; (b) under different wavelengths
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图 5. 三角形槽型凸面光栅的衍射效率仿真曲线。(a)不同顶角下;(b)不同波长下
Fig. 5. Simulation curves of diffraction efficiency of triangular groove convex grating. (a) Under different angles; (b) under different wavelengths
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图 6. 凸面光栅加工示意图
Fig. 6. Process diagram of convex grating
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图 7. 不同情况下的机床沿Y轴的偏差曲线。(a)波前影响下;(b)鬼线影响下;(c)杂散光影响下的标准偏差
Fig. 7. Deviation curves along Y-axis of machine under different conditions. (a) Under effect of wavefront; (b) under effect of ghost line; (c) standard deviation under effect of stray light
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图 8. 金刚石刻刀残留圆角对光栅衍射效率影响。(a)残留圆角示意图;(b)不同残留圆角影响下的光栅衍射效率
Fig. 8. Influence of residual fillet of diamond grave on diffraction efficiency of grating. (a) residual fillet diagram; (b) diffraction efficiency of grating with different residual fillet
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图 9. 研制的凸面光栅实物
Fig. 9. Real picture of developed convex grating
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图 10. 凸面光栅零级光波前形貌图
Fig. 10. Topography of zero-order optical wavefront of convex grating
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图 11. 凸面光栅表面剖面图。(a)凸面光栅表面轮廓;(b)凸面光栅AFM形貌图
Fig. 11. Profile of convex grating surface. (a) Surface profile of convex grating; (b) profile of convex grating
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图 12. 光栅衍射效率测试装置示意图
Fig. 12. Diagram of grating diffraction efficiency testing device
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图 13. 凸面闪耀光栅衍射效率曲线
Fig. 13. Diffraction efficiency curve of convex blazed grating
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图 14. 所设计的系统。(a)成像光谱仪系统结构;(b) SWIR成像光谱仪;(c)小型机载高光谱系统
Fig. 14. Proposed system. (a) Structure of imaging spectrometer; (b) SWIR imaging spectrometer; (c) small airborne hyperspectral system
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图 15. 飞行实验获取的高光谱数据与SNR曲线。(a)高光谱图像立方体;(b)典型地物辐亮度光谱曲线;(c) SNR曲线
Fig. 15. Hyperspectral data and SNR ratio curve obtained from flight experiment. (a) Hyperspectral image cube; (b) radiance spectral curve of typical ground objects; (c) SNR curve
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表 1成像光谱仪指标参数
Table1. Specifications of imaging spectrometer
| Parameter | Content |
|---|
| Wavelength range | 1000-2500 nm | | Spectral resolution | 10 nm | | Focal length | 130 mm | | F number | F/2.2 | | Linear dispersion | 7.5 nm/pixel | | Slit dimension | Height:12 mm,width: 25 μm | | Detector array size | 320 pixel×256 pixel | | Detector pixel size | 30 μm×30 μm |
|
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表 2凸面光栅参数
Table2. Parameters of convex grating
| Parameter | Content |
|---|
| Wavelength range | 1000-2500 nm | | Curvature radius | 70 mm | | Diameter | 52 mm | | Groove density | 60 line/mm | | Diffraction order | +1 | | Incident angle | 30° | | Diffraction efficiency /% | Above 60% | | Intensity ratio of stray light | Below 0.1% |
|
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表 3不同表面槽型光栅的衍射效率
Table3. Diffraction efficiency of gratings with different groove types%
| Structure | Maximum | Average | At initial wavelength | At terminal wavelength |
|---|
| Rectangular groove | 40.5 | 30 | 7 | 32 | | Triangular groove | 88.9 | 65 | 31 | 60.5 |
|
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表 4刻槽周期数据列表
Table4. Data list of groove spacing
| No. | d /μm | No. | d /μm | No. | d /μm | No. | d /μm |
|---|
| 1 | 16.698 | 11 | 16.664 | 21 | 16.652 | 31 | 16.652 | | 2 | 16.626 | 12 | 16.713 | 22 | 16.668 | 32 | 16.646 | | 3 | 16.708 | 13 | 16.619 | 23 | 16.624 | 33 | 16.674 | | 4 | 16.699 | 14 | 16.722 | 24 | 16.623 | 34 | 16.616 | | 5 | 16.705 | 15 | 16.685 | 25 | 16.714 | 35 | 16.644 | | 6 | 16.670 | 16 | 16.706 | 26 | 16.684 | 36 | 16.696 | | 7 | 16.654 | 17 | 16.629 | 27 | 16.700 | 37 | 16.670 | | 8 | 16.685 | 18 | 16.646 | 28 | 16.655 | 38 | 16.678 | | 9 | 16.696 | 19 | 16.729 | 29 | 16.723 | 39 | 16.701 | | 10 | 16.639 | 20 | 16.695 | 30 | 16.701 | 40 | 16.642 |
|
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郑志忠, 杨忠, 修连存. 高衍射效率短波红外凸面闪耀光栅的研制与应用[J]. 光学学报, 2020, 40(12): 1205002. Zhizhong Zheng, Zhong Yang, Liancun Xiu. Development and Application of Shortwave Infrared Convex Blazed Grating with High Diffraction Efficiency[J]. Acta Optica Sinica, 2020, 40(12): 1205002.
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