光学学报, 2001, 21 (4): 463, 网络出版: 2006-08-10   

多光源白光干涉仪的最佳波长组合

The Optimum Wavelength Combination in Multi-Light-Source White-Light Interferometer
作者单位
中国科学院上海光学精密机械研究所,上海 201800
摘要
使用多个宽带光源构成的组合光源的白光干涉仪,其干涉信号为单个光源干涉信号的叠加,从而使干涉信号强度重新分布。通过理论分析和计算机模拟,发现一个最佳波长组合,使干涉信号零级条纹与次级极大条纹的强度差变大,且由于它的使用可以更精确地确定零级中心条纹的位置,提高系统分辨率,降低对系统信噪比的要求。并提出了选择最佳波长组合的方法。
Abstract
The interference signal of white-light interferometer with several broadband light sources is the superposition of those only with one broadband light source. Then the signal intensity is redistributed. An optimum wavelength combination that makes the intensity difference between zero-order and first-order fringe increase is found by theoretical analysis and computer simulations. The use of the optimum wavelength combination results in the more accurate determination of zero-order fringe, the enhancement of the system resolution, and the decrease of the needed signal-noise-ratio for identifying zero-order fringe. The method to select the optimum wavelength combination is also presented.
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宋桂菊, 方祖捷, 王向朝. 多光源白光干涉仪的最佳波长组合[J]. 光学学报, 2001, 21(4): 463. 宋桂菊, 方祖捷, 王向朝. The Optimum Wavelength Combination in Multi-Light-Source White-Light Interferometer[J]. Acta Optica Sinica, 2001, 21(4): 463.

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