半导体光电, 2018, 39 (5): 643, 网络出版: 2019-01-10
基于热平衡机理的质子交换炉温控系统数学模型
Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism
图 & 表
伏娜, 张晞. 基于热平衡机理的质子交换炉温控系统数学模型[J]. 半导体光电, 2018, 39(5): 643. FU Na, ZHANG Xi. Research on Mathematical Model of Temperature Control System in Proton Exchange Furnace Based on Heat Balance Mechanism[J]. Semiconductor Optoelectronics, 2018, 39(5): 643.