中国激光, 2014, 41 (6): 0610001, 网络出版: 2014-04-09   

耦合间距对绝缘体上硅微环谐振腔的性能影响

Influence of Coupling Gap on the Performance of Silicon-no-Insulator Microring Resonator
作者单位
中北大学仪器科学与动态测试教育部重点实验室, 电子测试技术国家重点实验室, 山西 太原 030051
摘要
运用微机电系统(MEMS)工艺制备了不同耦合间距的微环谐振腔,针对耦合间距对耦合系数、谐振深度的影响,进行了理论分析与仿真,并对结构进行耦合实验测试。测试结果表明,随着微环耦合间距的增加,耦合系数减小,谐振深度变浅,这与理论仿真一致。实际计算了相应的耦合效率、3 dB带宽及品质因数,随着耦合间距增大,耦合效率降低,3 dB带宽也随之变窄,微环谐振腔的品质因数逐渐提高。研究结果为微环谐振腔的进一步优化设计及其在相关领域中的研究与应用提供了依据。
Abstract
Microring resonators with different coupling gaps are fabricated by micro-electro-mechanical-systems (MEMS) technology. To acquire the relationships of coupling gap with coupling coefficient and resonance depth, the theoretical analysis, simulation and coupling experiment are carried out. The test results show that, with the increase of the coupling gap, coupling coefficient decreases and coupling depth becomes shallower, which are consistent with simulation. Actual calculation of the coupling efficiency, 3 dB bandwidth and quality factor show that,as the gap increasing, the coupling efficiency becomes lower, 3 dB bandwidth turns narrower and the quality factor increases. The results provide a foundation for further design and optimization of microring resonator and its research and application in related fields.
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李明慧, 马可贞, 骆亮, 郭泽彬, 张安富, 薛晨阳, 张文栋, 闫树斌. 耦合间距对绝缘体上硅微环谐振腔的性能影响[J]. 中国激光, 2014, 41(6): 0610001. Li Minghui, Ma Kezhen, Luo Liang, Guo Zebin, Zhang Anfu, Xue Chenyang, Zhang Wendong, Yan Shubin. Influence of Coupling Gap on the Performance of Silicon-no-Insulator Microring Resonator[J]. Chinese Journal of Lasers, 2014, 41(6): 0610001.

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