采用Needle法,对全内腔绿光He-Ne激光器膜系进行设计,并给出了所设计膜系的光谱性能。利用离子溅射镀膜技术镀制了所设计的膜片并且给出了测量结果。制备了多种规格的全内腔绿光He-Ne激光器并且讨论了相关工艺。其中腔长420 mm的全内腔绿光He-Ne激光器的典型输出光功率为3 mW(单模),腔长360 mm的典型输出光功率为2 mW(单模),腔长240 mm的典型输出光功率为1 mW(单模),腔长100 mm的小短管子也能有0.1 mW的出光功率。

By making use of the needle method, the coating design of green He-Ne laser with internal cavity and the spectrum performance of the designed coating are introduced. The newly designed films of green He-Ne laser have been coated by making use of ion beam sputtering deposition, and the measured results have been given out. Many types of green He-Ne laser with internal cavity have been fabricated and the related techniques have been discussed. In these green He-Ne lasers, the lasers with cavity length of 420 mm have typical output power of 3 mW (single mode), the lasers of 360 mm have typical output power of 2 mW (single mode), the lasers of 240 mm have typical output power of 1 mW (single mode), and the small and short lasers with cavity length of 100 mm have also typical output power of 0.1 mW.