光学学报, 1995, 15 (3): 337, 网络出版: 2007-08-17
硅光波导的束传播法设计及制备
The PBM Design and Fabrication for Silicon Waveguides
摘要
报道用束传播法(Propagating beam method)模拟设计、指导硅大断面单模脊形光波导的制备工艺。应用傅里叶交换法计算了硅光波导中导模的传播常数。对实际研制成功的SIMOX及Si/GexSi1-x/Si单模脊形光波导，比较了其性能差异并给予理论解释。
Abstract
This paper reports the use of propagsting beam method (BPM) to simulate and design the large cross-section single mode rib waveguides. The Fourier transformation is used to calculate the propagating constants of the Si waveguides. For the practical SIMOX and Si/GexSi1-x/ Si single- mode rib waveguides, Comparison of the performance differences and theoritical explanation have been given.
潘姬, 赵鸿麟, 杨恩泽. 硅光波导的束传播法设计及制备[J]. 光学学报, 1995, 15(3): 337. 潘姬, 赵鸿麟, 杨恩泽. The PBM Design and Fabrication for Silicon Waveguides[J]. Acta Optica Sinica, 1995, 15(3): 337.
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