激光与光电子学进展, 1999, 36 (7): 26, 网络出版: 2006-08-08
一种表面粗糙度非接触快速测量的新方法
A New Noncontact Method for Rapidly Measuring Surface Roughness
激光 表面粗糙度 高斯曲线 光学探测器 计算机控制 反射光密度分布 laser surface roughness Gaussian curve optical sensor computer control reflected light intensity distribution
摘要
照射在样品表面的激光束随着表面粗糙度的不同,反射光密度分布将不同;表面粗糙度增大时,反射光密度将被扩展。本文根据这一原理,提出一种使用激光束快速测量表面粗糙度的无触点光学法。通过测量反射光密度分布曲线的半宽度,由高斯曲线系数的标准差计算表面粗糙度。文中给出了测量结果。
Abstract
A noncontact optical technique for rapidly measuring surface roughness using a laser is proposed. The reflected light intensity distribution of the laser beam illuminating the surface of a specimen will broaden as the surface roughness increases. The intensity distributions reflected from the surface of aluminum specimens were measured with a plasma coupled device(PCD). The reflected intensity curve can be approximated by a Gaussian function. The width of the intensity distribution curve was evaluated with the standard deviation, called a Gaussian curve parameter (GCP), of a Gaussian function approximating the intensity curve.
胡克平, 李田泽. 一种表面粗糙度非接触快速测量的新方法[J]. 激光与光电子学进展, 1999, 36(7): 26. 胡克平, 李田泽. A New Noncontact Method for Rapidly Measuring Surface Roughness[J]. Laser & Optoelectronics Progress, 1999, 36(7): 26.