光学与光电技术, 2009, 7 (4): 79, 网络出版: 2009-12-30
应用多传感器技术测量微孔几何参量
Microhole Geometry Measurement Applying Multi-Sensor Technology
补充材料
隋鑫, 徐熙平, 孙健, 张雷. 应用多传感器技术测量微孔几何参量[J]. 光学与光电技术, 2009, 7(4): 79. SUI Xin, XU Xi-ping, SUN Jian, ZHANG Lei. Microhole Geometry Measurement Applying Multi-Sensor Technology[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2009, 7(4): 79.