X轴分离式高速原子力显微镜系统设计
刘璐, 吴森, 胡晓东, 庞海, 胡小唐. X轴分离式高速原子力显微镜系统设计[J]. 光学 精密工程, 2018, 26(3): 662.
LIU Lu, WU Sen, HU Xiao-dong, PANG Hai, HU Xiao-tang. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and Precision Engineering, 2018, 26(3): 662.
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刘璐, 吴森, 胡晓东, 庞海, 胡小唐. X轴分离式高速原子力显微镜系统设计[J]. 光学 精密工程, 2018, 26(3): 662. LIU Lu, WU Sen, HU Xiao-dong, PANG Hai, HU Xiao-tang. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and Precision Engineering, 2018, 26(3): 662.