光学 精密工程, 2018, 26 (3): 662, 网络出版: 2018-04-25
X轴分离式高速原子力显微镜系统设计
Design of high-speed atomic force microscope with a separated X-scanner
补充材料
刘璐, 吴森, 胡晓东, 庞海, 胡小唐. X轴分离式高速原子力显微镜系统设计[J]. 光学 精密工程, 2018, 26(3): 662. LIU Lu, WU Sen, HU Xiao-dong, PANG Hai, HU Xiao-tang. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and Precision Engineering, 2018, 26(3): 662.