激光与光电子学进展, 2019, 56 (20): 202415, 网络出版: 2019-10-22
等离激元光电探测器的光吸收特性研究 下载: 1108次
Light Absorption Characteristics of Plasmonic Photodetectors
图 & 表
图 1. 数学模型结构图。(a)硅薄膜光电探测器的结构示意图;(b)数学模型的截面图
Fig. 1. Structural diagrams of mathematical model. (a) Schematic of silicon thin film photodetector; (b) cross-sectional view of mathematical model
图 2. 不同厚度的抗反射膜下,光吸收效率随波长的变化关系
Fig. 2. Relationship between light absorption efficiency and wavelength with different thicknesses of anti-reflection film
图 3. 衬底中光吸收效率随入射角度和波长的变化情况。(a) d=80 nm,P=260 nm;(b) d=80 nm,P=300 nm;(c) d=100 nm,P=110 nm;(d) d=100 nm,P=150 nm
Fig. 3. Absorption efficiency in substrate as a function of incident angle and wavelength. (a) d=80 nm,P=260 nm; (b) d=80 nm, P=300 nm; (c) d=100 nm, P=110 nm; (d) d=100 nm, P=150 nm
图 4. d=100 nm,P=110 nm时,吸收率、反射率和透效率随入射角度的变化情况。(a)(c) λ=700 nm;(b)(d) λ=800 nm
Fig. 4. Variations in absorption efficiency, reflection efficiency, and transmission efficiency with incident angle when d=100 nm and P=110 nm. (a)(c) λ=700 nm; (b)(d) λ=800 nm
表 1裸硅光电探测器的不同波长对应的效率
Table1. Efficiency of bare silicon photodetector at different wavelengths
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表 2等离激元光电探测器的不同波长对应的效率
Table2. Efficiency of plasmon photodetector at different wavelengths
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柯熙政, 周茹. 等离激元光电探测器的光吸收特性研究[J]. 激光与光电子学进展, 2019, 56(20): 202415. Xizheng Ke, Ru Zhou. Light Absorption Characteristics of Plasmonic Photodetectors[J]. Laser & Optoelectronics Progress, 2019, 56(20): 202415.