高性能短波红外 InGaAs焦平面探测器研究进展
邵秀梅, 龚海梅, 李雪, 方家熊, 唐恒敬, 李淘, 黄松垒, 黄张成. 高性能短波红外 InGaAs焦平面探测器研究进展[J]. 红外技术, 2016, 38(8): 629.
SHAO Xiumei, GONG Haimei, LI Xue, FANG Jiaxiong, TANG Hengjing, LI Tao, HUANG Songlei, HUANG Zhangchen. Developments of High Performance Short-wave Infrared InGaAs Focal Plane Detectors[J]. Infrared Technology, 2016, 38(8): 629.
[1] MacDougal Michael, Hood Andrew, Geske Jon, et al. InGaAs focal plane arrays for low light level SWIR imaging[C]//Proc. of SPIE, 2011,8012: 801221.
[2] Battaglia J, Blessinger M, Enriquez M, et al. An uncooled 1280×1024 InGaAs focal plane array for small platform, shortwave infrared imaging[C]//Proc of SPIE, 2009, 7298: 72983C1-8.
[3] Cohen M J, Olsen Gregory H. Room temperature InGaAs camera for NIR imaging[C]//Proc of SPIE, 1993, 1946: 436-443.
[4] Tara Martin, Dixon Peter, Gagliardi Mari-Anne. 320×240 pixel InGaAs/InP focal plane array for short-wave infrared and visible light imaging[C]//Proc. of SPIE, 2005, 5726: 85-91.
[5] Tara Martin, Brubaker Robert, Dixon Peter, et al. 640×512 InGaAs focal plane array camera for visible and SWIR imaging[C]//Proc. of SPIE, 2005, 5783: 12-20.
[6] Cohen Marshall J, Lange Michael J, Ettenberg Martin H, et al. A thin film Indium Gallium Arsenide focal plane array for visible and near infrared hyperspectral imaging[C]//12th Annual Meeting on IEEE Lasers and Electro-Optics Society, 1999, 2: 744-745.
[7] Battaglia J, Blessinger M, Enriquez M, et al. An uncooled 1280×1024 InGaAs focal plane array for small platform, shortwave infrared imaging[C]//Proc. of SPIE, 2009, 7298: 72983C.
[8] Onat Bora M, HUANG Wei, Masaun Navneet, et al. Ultra low dark current InGaAs technology for focal plane arrays for low-light level visible-shortwave infrared imaging[C]// Proc. of SPIE, 2007, 6542:65420L.
[9] Sensors Unlimited. Micro-SWIR 640 CSX Legacy Camera[EB/OL].[2015]. http://www.sensorsinc.com/products/detail/legacy -640csxswir-camera.
[10] Teledyne Judson Technologies. Indium Gallium Arsenide Detectors[EB/OL]. [2014]. http://www.teledynejudson.com/InGaAs. html.
[11] Xenics. PRODUCT SELECTOR GUIDE[EB/OL]. [2016]. http://www.xenics.com/en/products/cameras f[0]=field_technology_term%3A624.
[12] Sofradir. SWIR DETECTORS[EB/OL]. [2016]. http://www. sofradir.com/ category_product/swir-detectors/.
[13] LI Xue, HUANG Songlei, CHEN Yu, et al. Noise characteristics of short wavelength infrared InGaAs linear focal plane arrays[J].Journal of Applied Physics, 2012, 112(6):1-5.
[14] 邵秀梅, 李淘, 邓洪海, 等. 平面型24 元InGaAs 短波红外探测器[J]. 红外技术, 2011, 33(9): 501-504.
[15] SHI M, TANGH J, SHAOX M, et al. Interface property of silicon nitride films grown by ICPCVD and PECVD on In0.82Al0.18As[J].Infrared Physics and Technology, 2015, 71: 384-388.
[16] HUANG Xing, LI Xue, SHI Ming, et al. The 1/f noise characteristics of In0.83Ga0.17As photodiodes with SiNx passivation films fabricated by two different techniques[J]. Infrared Physics & Technology, 2014,67: 596-599.
[17] HUANG Xing, LI Xue, SHI Ming, et al. Effect of proton irradiation on extended wavelength In0.83Ga0.17As infrared detector[J]. Infrared Physics & Technology, 2015, 71: 514-517.
邵秀梅, 龚海梅, 李雪, 方家熊, 唐恒敬, 李淘, 黄松垒, 黄张成. 高性能短波红外 InGaAs焦平面探测器研究进展[J]. 红外技术, 2016, 38(8): 629. SHAO Xiumei, GONG Haimei, LI Xue, FANG Jiaxiong, TANG Hengjing, LI Tao, HUANG Songlei, HUANG Zhangchen. Developments of High Performance Short-wave Infrared InGaAs Focal Plane Detectors[J]. Infrared Technology, 2016, 38(8): 629.
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