Compact grating displacement measurement system with a 3 × 3 coupler
Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang. Compact grating displacement measurement system with a 3 × 3 coupler[J]. Chinese Optics Letters, 2015, 13(5): 051301.
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Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang. Compact grating displacement measurement system with a 3 × 3 coupler[J]. Chinese Optics Letters, 2015, 13(5): 051301.