Compact grating displacement measurement system with a 3 × 3 coupler

Chunhua Wei; Shuhua Yan; Cunbao Lin; Zhiguang Du; Guochao Wang

doi:doi:10.3788/COL201513.051301

Chinese Optics Letters, 2015, 13 (5): 051301, Published Online: Sep. 20, 2018

Compact grating displacement measurement system with a 3 × 3 coupler

Chunhua Wei Shuhua Yan ^*Cunbao Lin Zhiguang Du Guochao Wang

Author Affiliations

College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China

Figures & Tables

Fig. 1. Schematic diagram of the system configuration. C, collimator.

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Fig. 2. Schematic diagram of signal processing module.

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Fig. 3. Measurement system; (a) schematic diagram of the measurement system; (b) picture of the prototype of the measurement system. HPI, Hewlett Packard interferometer; LS, laser source; PC, personal computer.

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Fig. 4. Grating images; (a) by Zygo New View 700; (b) by SEM.

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Fig. 5. Output of three interference signals.

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Fig. 6. Comparison measurement result of the 10 mm round-trip; (a) original displacement difference; (b) linear fitting and residual error for the forward movement; (c) linear fitting and residual error for the backward movement. Disp, displacement.

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Fig. 7. Comparison measurement result of 200 μm movement; (a) original displacement difference; (b) linear fitting and residual error for the movement.

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Fig. 8. Stability test results; (a) the system stability measurement results for our system and HP5530 for 300 s; (b) Allan deviation analysis of the measurement data.

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Chunhua Wei, Shuhua Yan, Cunbao Lin, Zhiguang Du, Guochao Wang. Compact grating displacement measurement system with a 3 × 3 coupler[J]. Chinese Optics Letters, 2015, 13(5): 051301.

Compact grating displacement measurement system with a 3 × 3 coupler

Fig. 1. Schematic diagram of the system configuration. C, collimator.

Fig. 2. Schematic diagram of signal processing module.

Fig. 3. Measurement system; (a) schematic diagram of the measurement system; (b) picture of the prototype of the measurement system. HPI, Hewlett Packard interferometer; LS, laser source; PC, personal computer.

Fig. 4. Grating images; (a) by Zygo New View 700; (b) by SEM.

Fig. 5. Output of three interference signals.

Fig. 6. Comparison measurement result of the 10 mm round-trip; (a) original displacement difference; (b) linear fitting and residual error for the forward movement; (c) linear fitting and residual error for the backward movement. Disp, displacement.

Fig. 7. Comparison measurement result of 200 μm movement; (a) original displacement difference; (b) linear fitting and residual error for the movement.

Fig. 8. Stability test results; (a) the system stability measurement results for our system and HP5530 for 300 s; (b) Allan deviation analysis of the measurement data.

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Compact grating displacement measurement system with a 3 × 3 coupler

Fig. 1. Schematic diagram of the system configuration. C, collimator.

Fig. 2. Schematic diagram of signal processing module.

Fig. 3. Measurement system; (a) schematic diagram of the measurement system; (b) picture of the prototype of the measurement system. HPI, Hewlett Packard interferometer; LS, laser source; PC, personal computer.

Fig. 4. Grating images; (a) by Zygo New View 700; (b) by SEM.

Fig. 5. Output of three interference signals.

Fig. 6. Comparison measurement result of the 10 mm round-trip; (a) original displacement difference; (b) linear fitting and residual error for the forward movement; (c) linear fitting and residual error for the backward movement. Disp, displacement.

Fig. 7. Comparison measurement result of 200 μm movement; (a) original displacement difference; (b) linear fitting and residual error for the movement.

Fig. 8. Stability test results; (a) the system stability measurement results for our system and HP5530 for 300 s; (b) Allan deviation analysis of the measurement data.

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