利用刻蚀工艺制备碲镉汞雪崩光电二极管
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李浩, 林春, 周松敏, 王溪, 孙权志. 利用刻蚀工艺制备碲镉汞雪崩光电二极管[J]. 红外与毫米波学报, 2019, 38(2): 02223. LI Hao, LIN Chun, ZHOU Song-Min, WANG Xi, SUN Quan-Zhi. HgCdTe avalanche photo diode fabricated by ion beam etching[J]. Journal of Infrared and Millimeter Waves, 2019, 38(2): 02223.