激光与光电子学进展, 2018, 55 (7): 071401, 网络出版: 2018-07-20   

基于相机式激光光束参数测量精度的影响因素分析 下载: 891次

Analysis of the Influence Factors on High Precision Measurement of Laser Beam Parameter Based on Camera
作者单位
1 天津大学精密仪器与光电子工程学院, 天津 300072
2 珠海光库科技股份有限公司, 广东 珠海 519000
摘要
针对相机式光束质量分析仪测量光束的结果不一致问题,分析了相关参数对测量误差的影响。基于高斯光束模型,并添加与实际对应的噪声,根据ISO 11146标准计算了光斑直径。结合实验测试时的实际操作过程,提炼出光强饱和度、积分面积比、信噪比和光斑尺寸4个关键参数。不仅阐明了相机参数对测量误差影响的关键趋势,还分析了各个参数之间的关联影响,最终对如何选择相机的像元、像素、动态范围、暗噪声,以及如何设置积分时间、计算区域等提出了更明确的要求。
Abstract
To tackle the problem that the camera-based beam analyzer often gives the different results of the laser beam quality, we analyze the impact of the relevant parameters on the measurement error of the laser beam. The beam diameter is calculated by the ISO 11146 standard based on the Gaussian model with the noise level corresponding to the real one. According to the actual operation during testing, four parameters are analyzed, including the light intensity saturation, integral area ratio, signal to noise ratio and actual beam size. Compared with the prior works, we found the key trend of the camera parameters on the measurement error and the correlation between the parameters, which will be helpful to put forward more specific requirements on how to choose the camera and how to set the integration time and the calculation area.
参考文献

[1] 付福兴, 畅庚榕, 赵小侠, 等. 激光光斑直径对熔覆层裂纹的影响[J]. 激光与光电子学进展, 2015, 52(3): 031401.

    Fu F X, Chang G R, Zhao X X, et al. Influence of laser spot diameter on cladding layer cracking[J]. Laser & Optoelectronics Progress, 2015, 52(3): 031401.

[2] 刘海强, 李文娟, 常坤, 等. 基于刀口测量法的激光光束质量误差特性[J]. 激光与光电子学进展, 2016, 53(12): 121402.

    Liu H Q, Li W J, Chang K, et al. Error characteristics of laser beam quality based on knife-edge measuring method[J]. Laser & Optoelectronics Progress, 2016, 53(12): 121402.

[3] 朱峰, 黄珂, 周松青, 等. 基于非稳腔的非链式脉冲HF激光光束质量优化[J]. 中国激光, 2017, 44(4): 0401002.

    Zhu F, Huang K, Zhou S Q, et al. Laser beam quality optimization of no-chain pulsed HF laser using unstable resonator[J]. Chinese Journal of Lasers, 2017, 44(4): 0401002.

[4] 彭亚蒙, 苏宙平. 用于发散激光光束整形的自由曲面透镜设计[J]. 光学学报, 2016, 36(5): 0522003.

    Peng Y M, Su Z P. Design of freeform surface lens for shaping divergent laser beam[J]. Acta Optica Sinica, 2016, 36(5): 0522003.

[5] Technical Committee ISO/TC 172,Optics and photonics, Subcommittee SC 9, Electro-optical systems. Lasers and laser-related equipment: test methods for laser beam widths, divergence angles and beam propagation ratios: ISO 11146[S].1999.

[6] 尹志斌, 陈虹, 王旭葆, 等. 激光光束光斑质量诊断技术研究及其标准化进展[J]. 激光与光电子学进展, 2011, 48(8): 081406.

    Yin Z B, Chen H, Wang X B, et al. Research and standardization on diagnostic of laser beam characteristics[J]. Laser & Optoelectronics Progress, 2011, 48(8): 081406.

[7] Roundy C B. Techniques for accurately measuring laser beam width with commercial CCD cameras[J]. Proceedings of SPIE, 1998, 3405: 1045-1055.

[8] 许秀贞, 李自田, 薛利军. CCD噪声分析及处理技术[J]. 红外与激光工程, 2004, 33(4): 343-347.

    Xu X Z, Li Z T, Xue L J. Analysis and processing of CCD noise[J]. Infrared and Laser Engineering, 2004, 33(4): 343-347.

[9] 刘亚群, 唐顺兴, 郭亚晶, 等. CCD光电响应非线性特性对高功率激光光束质量评价的影响[J]. 中国激光, 2015, 42(4): 0402001.

    Liu Y Q, Tang S X, Guo Y J, et al. Analysis of influence of CCD′s nonlinear photoelectric characterization on evaluating the high power laser beam quality[J]. Chinese Journal of Lasers, 2015, 42(4): 0402001.

[10] 曹一磊, 高春清. 基于面阵CCD的激光光束参数测量系统精度分析[J]. 光学技术, 2004, 30(5): 583-586.

    Cao Y L, Gao C Q. Analysis on the accuracy of beam parameter measurement by using CCD array[J]. Optical Technique, 2004, 30(5): 583-586.

[11] 高雪松, 高春清, 杨绍状, 等. 面阵CCD激光束参量测量系统及其实验研究[J]. 中国激光, 2005, 32(7): 993-996.

    Gao X S, Gao C Q, Yang S Z, et al. Experimental study on beam parameter measurement system by using area array CCD[J]. Chinese Journal of Lasers, 2005, 32(7): 993-996.

肖青, 刘侠, 邓剑钦, 姚建铨, 张大鹏, 王兴龙. 基于相机式激光光束参数测量精度的影响因素分析[J]. 激光与光电子学进展, 2018, 55(7): 071401. Xiao Qing, Liu Xia, Deng Jianqin, Yao Jianquan, Zhang Dapeng, Wang Xinglong. Analysis of the Influence Factors on High Precision Measurement of Laser Beam Parameter Based on Camera[J]. Laser & Optoelectronics Progress, 2018, 55(7): 071401.

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