基于石墨烯薄膜的光纤微压传感器的设计

以新型的石墨烯材料为压力敏感膜, 设计了一种基于法布里-珀罗干涉的光纤微压传感器。利用薄膜光学理论, 分析了不同层数石墨烯膜的反射率特性。仿真结果表明, 增加层数可以提高石墨烯膜的反射率。根据光传输矩阵的理论, 研究并模拟了法珀腔的几何参数对反射信号的影响。通过分析对比几种大挠度圆膜应变的理论, 建立了石墨烯薄膜的压力敏感特性模型, 并利用ANSYS静态力学非线性对模型的挠度形变特性进行有限元仿真, 验证了模型的准确性, 为设计制作基于石墨烯薄膜的光纤微压传感器提供了理论基础。

Abstract

Based on the new type graphene material as the pressure sensitive diaphragm, a kind of optical fiber micro-pressure sensor based on Fabry-Perot interference was designed. The reflectivity characteristics of graphene films were analyzed with the theory of thin film optics. Simulation results show that increasing the number of layers can improve the reflectivity of graphene films. According to the theory of optical transmission matrix, the influence of the geometric parameters of the F-P cavity on the reflected signal was studied and simulated. The pressure-sensitive characteristic model of graphene film was established by analyzing the theory of several large deflection circular film strain. The finite element simulation of the deflection behavior of the model was carried out by ANSYS static mechanics nonlinearity, which verifies the accuracy of the model, providing a theoretical basis for the design of optical fiber micro-pressure sensor based on graphene film.

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葛益娴, 张鹏, 赵伟绩. 基于石墨烯薄膜的光纤微压传感器的设计[J]. 半导体光电, 2018, 39(1): 37. GE Yixian, ZHANG Peng, ZHAO Weiji. Design of Micro-pressure Sensor Based on Graphene Diaphragm[J]. Semiconductor Optoelectronics, 2018, 39(1): 37.

基于石墨烯薄膜的光纤微压传感器的设计

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