光学学报, 2010, 30 (9): 2646, 网络出版: 2014-05-15   

极紫外光谱仪光学系统的优化设计

Optimization of Optical System of Extreme UltraViolet Spectrometer
作者单位
上海大学精密机械系, 上海 200072
摘要
将平面对称光学系统的像差理论应用于极紫外(XUV)光栅仪器的评价函数,可以得到评价函数关于光学参量的解析表达式。应用合作型协同进化遗传算法来解决多参量评价函数的优化问题,建立了优化程序。应用该程序对XUV摄谱仪系统进行优化设计,并运用光线追迹程序Shadow对该光学系统进行数值成像计算和比较,研究结果表明发展的评价函数在XUV多元件光栅光学系统优化设计中是十分有效的。
Abstract
The aberration theory of planesymmetric optical systems recently developed is applied to the merit function of extreme ultraviolet (XUV) grating instrument defined; consequently the merit function can be expressed as a function of optical parameters. This merit function of multiple parameters is optimized with the cooperative coevolutionary genetic algorithms. The optimization program is set up, which is then used to optimize a XUV flatfield spectrograph system; the ray tracing calculations to the optical system are made with the program Shadow. The imaging calculations show that the merit function is a very useful means to optimize the XUV multielement grating instruments.
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徐挺, 吕丽军. 极紫外光谱仪光学系统的优化设计[J]. 光学学报, 2010, 30(9): 2646. Xu Ting, LV Lijun. Optimization of Optical System of Extreme UltraViolet Spectrometer[J]. Acta Optica Sinica, 2010, 30(9): 2646.

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