Chinese Optics Letters, 2006, 4 (9): 550, Published Online: Sep. 14, 2006
Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors 
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| DOI: | -- |
| 中图分类号: | -- |
| 栏目: | |
| 项目基金: | -- |
| 收稿日期: | Feb. 27, 2006 |
| 修改稿日期: | -- |
| 网络出版日期: | Sep. 14, 2006 |
| 通讯作者: | Fengli Wang (wangzs@mail.tongji.edu.cn) |
| 备注: | -- |
Fengli Wang, Zhanshan Wang, Jingtao Zhu, Zhong Zhang, Wenjuan Wu, Shumin Zhang, Lingyan Chen. Determination of the deposition rate of DC magnetron sputtering in fabrication of X-ray supermirrors[J]. Chinese Optics Letters, 2006, 4(9): 550.
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