Chinese Optics Letters, 2012, 10 (7): 071202, Published Online: Apr. 5, 2012
Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement Download: 646次
Basic Information
DOI: | 10.3788/col201210.071202 |
中图分类号: | -- |
栏目: | Instrumentation, measurement, and metrology |
项目基金: | -- |
收稿日期: | Dec. 5, 2011 |
修改稿日期: | -- |
网络出版日期: | Apr. 5, 2012 |
通讯作者: | |
备注: | -- |
Bofan Wang, Zhongliang Li, Xiangzhao Wang. Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement[J]. Chinese Optics Letters, 2012, 10(7): 071202.