Chinese Optics Letters, 2012, 10 (7): 071202, Published Online: Apr. 5, 2012  

Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement Download: 646次

Author Affiliations
Copy Citation Text

Bofan Wang, Zhongliang Li, Xiangzhao Wang. Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement[J]. Chinese Optics Letters, 2012, 10(7): 071202.

References

[1] N. A. Massie, Appl. Opt. 19, 154 (1980).

[2] R. Dandliker, R. Thalmann, and D. Prongue, Opt. Lett. 13, 339 (1988).

[3] O. Sasaki, K. Akiyama, and T. Suzuki, Appl. Opt. 41, 3906 (2002).

[4] J. Shang, S. Zhao, Y. He, W. Chen, and N. Jia, Chin. Opt. Lett. 9, 081201 (2011).

[5] O. Sasaki and K. Takahashi, Appl. Opt. 27, 4139 (1988).

[6] S. Song, X. Wang, X. Wang, F. Qian, and G. Chen, Chinese J. Lasers (in Chinese) 28, 753 (2001).

[7] X. Wang, X. Wang, Y. Liu, C. Zhang, and D. Yu, Opt. Laser Technol. 35, 219 (2003).

[8] Z. Li, X. Wang, Y. Liu, and Y. Bu, Chinese J. Lasers (in Chinese) 34, 1267 (2007).

[9] T. Suzuki, K. Kobayashi, and O. Sasaki, Appl. Opt. 39, 2646 (2000).

[10] O. Sasaki, H. Sasazaki, and T. Suzuki, Appl. Opt. 30, 4040 (1991).

[11] T. Suzuki, M. Matsuda, O. Sasaki, and T. Maruyama, Appl. Opt. 38, 7069 (1999).

[12] C. M. Klimcak and J. C. Camparo, J. Opt. Soc. Am. B 5, 211 (1988).

[13] Z. Li, X. Wang, P. Bu, B. Huang, and D. Zhen, Optik 121, 799 (2009).

[14] X. Sun, Theory and Application of Interferometry using Laser Diode (in Chinese) (National Defence Industrial Press, Beijing, 1998) pp 70-73.

Bofan Wang, Zhongliang Li, Xiangzhao Wang. Two-wavelength sinusoidal phase-modulating interferometer for nanometer accuracy measurement[J]. Chinese Optics Letters, 2012, 10(7): 071202.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!