光学学报, 1982, 2 (5): 458, 网络出版: 2011-09-15   

用于空间频谱分析的楔、环阵列探测器的研制和特性

The design and fabrication of wedge-ring detectors for optical power spectrum analysis
作者单位
复旦大学物理系激光物理研究室
摘要
在混合型频谱分析系统中,楔、环阵列探测器可用作光学系统和电子系统之间的连接器件,对光信号采样后输入计算机处理。我们的实验室设计和研制的这种探测器具有32个半圆环状探测器以检测径向信号32个楔形探测器以检测方位信号。该探测器在一块直径约32mm的硅片上制成,采用控制扩散过程以获得均匀的响应率和灵敏度。楔形探测器和与楔形探测器面积相当的半圆环探测器的平均响应率约为0.5mA/mW,时间常数约为150μs。若用焦距为240mm的变换透镜,光源为6328(?)的氦氖激光时,空间频率带宽可高达100周。
Abstract
In hybrid optical power spectrum analysis systems, the wedge-ring array deteclor functions as an optical to electrical interface device for sampling the optical spatial frequency information for further processing by digit computer. The detector designed and fabricated in our laboratory consists of 32 semi-circular rings for detecting the radial information and with 32 wedge-shaped sections for the directional information in the spectrum. The detector is made on a silicon wafer diameter is about 32 mm with carefully controlled diffusion process in order to obtain uniformity in response and sensitivity. The average responsibility is about 0.5mA/mW for "the wedges and annular rings of ihe corresponding areas, the time constant is about 150 μθ. The spatial bandwid-fch could be up io 100 cycles with an optical transform lens of 240 mm fooal length irradiaied by ihe He-Ne radiation of 632.8 nm.

赵焕卿, 杜元成, 赵在忠, 章志鸣. 用于空间频谱分析的楔、环阵列探测器的研制和特性[J]. 光学学报, 1982, 2(5): 458. ZHAO HUANQING, DU YUANCHENG, ZHAO ZAIZHONG, ZHANG ZHIMING. The design and fabrication of wedge-ring detectors for optical power spectrum analysis[J]. Acta Optica Sinica, 1982, 2(5): 458.

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