强激光与粒子束, 2014, 26 (12): 122007, 网络出版: 2015-01-08  

功率对氘代辉光放电聚合物结构和力学性能的影响

Influence of radio frequency power on structure and property of carbon-deuterium glow discharge polymer films
作者单位
1 四川大学 原子与分子物理研究所, 成都 610065
2 中国工程物理研究院 激光聚变研究中心, 四川 绵阳 621900
摘要
采用射频辉光放电聚合技术,在低压等离子体聚合装置上开展在5~20 W功率下氘代辉光放电聚合物薄膜的制备及性能研究。利用傅里叶变换红外吸收光谱仪表征薄膜的化学结构,讨论了功率变化对其官能团结构的影响规律。利用元素分析仪和纳米压痕仪表征薄膜中氘原子的相对含量和薄膜的力学性能。研究表明:随着功率的升高,薄膜中的氘含量先升高后降低,在10 W时达到最大,薄膜中SP3CD的相对含量增加,SP3CD2的相对含量减小;聚合物薄膜的硬度和杨氏模量均随功率的增加而减小。
Abstract
Carbon-deuterium polymer films were fabricated at different powers by the discharge polymerization technology.The difference of chemical structures was characterized by FT-IR. The content of deuterium of films was characterized by element analysis and the hardness and modulus of films were measured by nanoindentation. It was found that with the RF power increasing, the D contents in the films firstly increased, then decreased, and reached to the biggest at 10 W. The CD bands content increased, while the CD2 bands content decreased. The hardness and modulus of films decreased when the RF power increased.
参考文献

[1] 唐永健,张林,吴卫东,等. ICF靶材料和靶制备技术研究进展[J].强激光与粒子束,2008,20(11): 1774-1781.(Tang Yongjian, Zhang Lin, Wu Weidong, et al. Research progress on ICF target materials and target fabrication technology. High Power Laser and Particle Beams,2008,20(11): 1774-1781)

[2] 刘兴华,吴卫东,何智兵,等. α-C:H膜化学结构对光学性能的影响[J].强激光与粒子束,2009,21(3): 351-353.(Liu Xinghua, Wu Weidong, He Zhibing, et al. Influence of chemical structure of α-C:H films on optics property. High Power Laser and Particle Beams, 2009,21(3): 351-353)

[3] Nikroo A, Czechowicz D, Chen K C, et al. Mechanical properties of thin GDP shells used as cryogenic direct drive targets at OMEGA[R]. GA-A24457,2003.

[4] Robert C C, Mitchell A, Stephan A, et al. IR absorptive properties of plastic materials used in ICF capsules[J]. Fusion Science and Technology, 2004,45(2): 148-156.

[5] Miller W J. Inertial confinement fusion target component fabrication and technology development support[R]. General Atomics Report, GA-A23852, 2001.

[6] Mathis N, Meunier C, Munnik F, et al. Deuterium influence on optical gap amorphous carbon diamond-like carbon(DLC)thin film[J]. Thin Solid Films, 2008,156(7): 1508-1511.

[7] Mathis N, Meunier C, Guibert G, et al. Deuterated diamond like carbon films(DDLC): Mechanical properties in relation with microstructure[J]. Surface & Coating Technology, 2008, 202(11): 2349-2353.

[8] 闫建成, 何智兵, 阳志林, 等.射频功率对辉光放电聚合物结构和性能的影响[J].物理学报,2011, 60(3): 481-485.(Yan Jiancheng, He Zhibing, Yang Zhilin, et al. Influence of RF power on the structure and properties of glow discharge polymer. Acta Physica Sinica, 2011, 60(3): 481-485)

[9] 牛忠彩, 何智兵, 张颖, 等.射频功率对辉光放电聚合物薄膜结构与光学性质的影响[J].物理学报,2012, 61(10): 356-361.(Niu Zhongcai, He Zhibing, Zhang Ying, et al. Influence of radio frequency power on the structure and optical properties of glow discharge polymer films. Acta Physica Sinica, 2012, 61(10): 356-361)

[10] 何智兵, 阳志林, 闫建成, 等.不同参数对GDP薄膜的结构与力学性能的影响[J]. 原子能科学与技术, 2010, 44(8): 990-994.(He Zhibing, Yang Zhilin, Yan Jiancheng, et al. Effects of parameters on structure and mechanical properties of glow discharge polymer films. Atomic Energy Science and Technology, 2010, 44(8): 990-994)

[11] 张玲, 何智兵, 李俊, 等.溅射功率对碳化硼薄膜组分与力学性能的影响[J].强激光与粒子束, 2013, 25(9): 2317-2323.(Zhang Ling, He Zhibing, Li Jun, et al. Influence of sputtering power on components and mechanical properties of boron carbide films. High Power Laser and Particle Beams, 2013, 25(9): 2317-2323)

[12] 张泰华.微/纳米力学测试技术及其应用[M].北京: 机械工业出版, 2005.(Zhang Taihua. Micro/Nano Mechanics and Testing Technology. Beijing: Mechanism Industry Press, 2005)

[13] Hirakuri K K, Minorikawa T, Friedbacher G, Thin film characterization of diamond-like carbon films prepared by R.F plasma chemical vapor deposition[J]. Thin Solid Film, 1997,302(1): 5-11.

[14] Rotaru C, Pawlak F, Khalfaoui N, et al. Track formation in two amorphous insulators, vitreous silica and diamond like carbon: Experimental observations and description by the inelastic thermal spike model[J]. Nuclear Instruments and Methods in Physics Research B, 2012, 272: 9-14.

[15] von Keudell A, Meier M, Schwarz-Selinger T. Simultaneous interaction of methyl radicals and atomic hydrogen with amorphous hydrogenated carbon films, as investigated with optical in situ diagnostics[J]. Appl Phys A, 2001,72(5): 551-556.

[16] Khare B N , Meyyappan M, Cassell A M, et al. Functionalization of carbon nanotubes using atomic hydrogen from a glow discharge[J]. Nano Lett, 2002, 2(1): 73-77.

[17] Li H X, Xu T, Wang C B, et al. Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films[J]. Thin Solid Films, 2006, 515(4): 2153-2160.

[18] Silinskas M, Grigonis A, Kulikauskas V, et al. Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam[J]. Thin Solid Films, 2008,516(8): 1683-1692.

[19] Ternyak O, Michaelson S, Tkach L, et al. The impact of gas isotopic exchange on the growth rate and hydrogen(deuterium)bonding within CVD diamond films[J]. Phys Stat Sol, 2007, 204(9): 2839-2846.

[20] 李幼真, 刘雄飞, 肖建荣, 等.a-C∶F薄膜的工艺及热稳定性研究[J]. 真空科学与技术, 2004(3): 23-26.(Li Youzhen, Liu Xiongfei, Xiao Jianrong, et al. Study on the thermal stability and fabrication techniques of a-C∶F thin film. Vacuum Electronics, 2004(3): 23-26)

[21] Czechowicz D G, Castillo E R, Nikroo A. Composition and structural studies of strong glow discharge polymer coatings[J]. Fusion Science and Technology,2002,41(3): 188-192.

[22] Maia da Costa M E H, Freore Jr F L. Deuterated amorphous carbon films: film growth and properties[J]. Surface & Coating Technology, 2010, 204(12): 1993-1996.

[23] 李红轩, 徐洮, 陈建敏, 等.射频功率对类金刚石薄膜结构和性能的影响[J].物理学报,2005, 54(4):1885-1889.(Li Hongxuan, Xu Zhao, Chen Jianmin, et al. Effect of RF power on the structure and properties of diamond-like carbon films. Acta Physica Sinica, 2005,54(4): 1885-1889)

刘浩, 何智兵, 何小珊, 贾晓琴, 韦建军. 功率对氘代辉光放电聚合物结构和力学性能的影响[J]. 强激光与粒子束, 2014, 26(12): 122007. Liu Hao, He Zhibing, He Xiaoshan, Jia Xiaoqin, Wei Jianjun. Influence of radio frequency power on structure and property of carbon-deuterium glow discharge polymer films[J]. High Power Laser and Particle Beams, 2014, 26(12): 122007.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!