光学学报, 2020, 40 (2): 0212001, 网络出版: 2020-01-02
单交变光场的微控移相精密直线位移测量方法 
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Measurement Method for Micro-Controlled Phase-Shifting Precise Linear Displacement of Single-Alternating Light Field
图 & 表
图 1. 传感器结构模型图。(a)多交变光场传感器结构示意图;(b)单交变光场传感器结构示意图
Fig. 1. Schematics of sensor structural model. (a) Schematic of sensor structure with multi-alternating light field; (b) schematic of sensor structure with single-alternating light field
图 3. 单交变光场传感器电行波信号合成原理
Fig. 3. Principle of electric traveling wave signal synthesis of single-alternating light field sensor
图 4. 含有移相误差的行波信号Matlab仿真波形图
Fig. 4. Matlab simulation waveform of traveling wave signal containing phase-shifting error
图 5. 光源光强分布。(a)理想点光源仿真光斑;(b) LED光源仿真光斑
Fig. 5. Intensity distribution of light source. (a) Simulated spot of ideal point light source; (b) simulated spot of LED light source
图 6. 光场分布不一致的行波信号Matlab仿真波形图
Fig. 6. Matlab simulation waveform of traveling wave signal with inconsistent light-field distribution
图 7. 单交变光场式传感器装置与实验平台
Fig. 7. Device and experimental platform for single-alternating light field sensor
图 8. 移相角度90°测量误差曲线。(a)移相角度90°;(b)位移测量误差曲线
Fig. 8. Measurement error curve with phase-shifting angle of 90°. (a) Phase-shifting angle of 90°; (b) error curve of displacement measurement
图 9. 相位角存在偏差的测量误差曲线。(a)移相角度92°;(b)位移测量误差曲线
Fig. 9. Measurement error curve with phase-shifting angle deviation. (a) Phase-shifting angle of 92°; (b) error curve of displacement measurement
图 10. 多光场与单光场实验误差曲线。(a)单光场测量误差曲线;(b)多光场测量误差曲线
Fig. 10. Experimental error curves of multi-alternating light field and single-alternating light field. (a) Measurement error curve of single-alternating light field; (b) measurement error curve of multi-alternating light field
图 11. 不同光源光斑及光强分布曲线。(a) LED光斑及光强分布曲线;(b)激光光斑及光强分布曲线
Fig. 11. Light spots of different sources and distribution curves of light intensity. (a) Light spot of LED and distribution curve of light intensity; (b) laser spot and distribution curve of light intensity
图 12. 不同光源测量误差曲线。(a)散射角度为2°的LED测量误差曲线;(b)激光光源测量误差曲线
Fig. 12. Measurement error curves of different light sources. (a) Measurement error curve of LED beam with scattering angle of 2°; (b) measurement error curve of laser beam
朱革, 蒲治伟, 付敏, 李昌利, 余小雨, 张双亚. 单交变光场的微控移相精密直线位移测量方法[J]. 光学学报, 2020, 40(2): 0212001. Ge Zhu, Zhiwei Pu, Min Fu, Changli Li, Xiaoyu Yu, Shuangya Zhang. Measurement Method for Micro-Controlled Phase-Shifting Precise Linear Displacement of Single-Alternating Light Field[J]. Acta Optica Sinica, 2020, 40(2): 0212001.
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