光学学报, 2008, 28 (12): 2394, 网络出版: 2008-12-17   

硅片绒面形貌影响光线反射的数值研究

Numerical Study on Effect of Silicon Texture Structure on Reflectance of Light
作者单位
1 南京航空航天大学江苏省精密与微细制造技术重点实验室, 江苏 南京 210016
2 南京航空航天大学机电学院, 江苏 南京 210016
引用该论文

邱明波, 黄因慧, 刘志东, 田宗军, 汪炜. 硅片绒面形貌影响光线反射的数值研究[J]. 光学学报, 2008, 28(12): 2394.

Qiu Mingbo, Huang Yinhui, Liu Zhidong, Tian Zongjun, Wang Wei. Numerical Study on Effect of Silicon Texture Structure on Reflectance of Light[J]. Acta Optica Sinica, 2008, 28(12): 2394.

参考文献

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邱明波, 黄因慧, 刘志东, 田宗军, 汪炜. 硅片绒面形貌影响光线反射的数值研究[J]. 光学学报, 2008, 28(12): 2394. Qiu Mingbo, Huang Yinhui, Liu Zhidong, Tian Zongjun, Wang Wei. Numerical Study on Effect of Silicon Texture Structure on Reflectance of Light[J]. Acta Optica Sinica, 2008, 28(12): 2394.

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