硅基二氧化硅偏振分束器的设计及误差分析

潘盼; 李伶俐; 蔡雪原

doi:doi:10.3788/lop54.122301

激光与光电子学进展, 2017, 54 (12): 122301, 网络出版: 2017-12-11

硅基二氧化硅偏振分束器的设计及误差分析下载： 944次

Design and Error Analysis of Silica on Silicon Based Polarization Beam Splitter

论文大纲

潘盼 ^*李伶俐蔡雪原

作者单位

安庆师范大学物理与电气工程学院, 安徽安庆 246133

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摘要

设计了一种非对称臂马赫-曾德尔干涉仪(MZI)型硅基二氧化硅偏振分束器(PBS), 在1535～1565 nm波长范围内, 其偏振消光比大于20 dB, 插入损耗大于-0.5 dB。采用有限差分-束传播法(FD-BPM)进行误差分析, 分别计算了多模波导的宽度和长度以及非对称臂的宽度和长度误差对偏振分束器性能的影响。仿真结果表明, 多模波导长度和非对称臂长度误差分别小于±2 μm和±4 μm时, 偏振分束器的消光比和插入损耗仍能保持较好的结果; 而要保持20 dB以上的偏振消光比, 多模波导宽度误差应小于±500 nm, 非对称臂宽度误差应小于±4 nm(宽臂)和±2.5 nm(窄臂)。非对称臂宽度对工艺的要求比较高, 拟利用热光效应改变波导折射率来补偿波导尺寸变化引起的相位误差, 以便下一步制备出高性能的硅基二氧化硅偏振分束器。

Abstract

A polarization beam splitter (PBS) based on silica on silicon is designed by using asymmetric Mach-Zehnder interferometer (MZI). Within the wavelength range of 1535-1565 nm, the polarization extinction ratio is larger than 20 dB, and the insertion loss is larger than -0.5 dB. In addition, the finite difference-beam propagation method is adopted, the effect of errors of width/length of multimode waveguide and asymmetric arms on the performance of PBS is calculated, respectively. The simulation results indicate that, when the length errors of multimode waveguide and asymmetric arms are less than ±2 μm and ±4 μm, respectively, the extinction ratio and the insertion loss are still well. To keep the polarization extinction ratio more than 20 dB, width error of multimode waveguide should be less than ±500 nm, and width error of asymmetric arms should be less than ±4 nm (wide arm) and ±2.5 nm (narrow arm). The widths of asymmetric arms ask for high requirement in fabrication process. The thermo-optic effect should be used to regulate refractive index of the waveguide, thus compensating the phase error caused by waveguide dimensional change, so it can be used to fabricate high-performance silica on silicon PBS in the next step.

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潘盼, 李伶俐, 蔡雪原. 硅基二氧化硅偏振分束器的设计及误差分析[J]. 激光与光电子学进展, 2017, 54(12): 122301. Pan Pan, Li Lingli, Cai Xueyuan. Design and Error Analysis of Silica on Silicon Based Polarization Beam Splitter[J]. Laser & Optoelectronics Progress, 2017, 54(12): 122301.

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