报道用5 ns脉冲激光通过激光气体合金化形成氮化钛的研究。通过探测发射光谱观察了氨化过程,用光学显微镜和扫描电子显微镜观察了氨化层的表面形貌,激光烧蚀飞行时间质谱和X射线衍射标征了氮化层。激光脉冲起着熔化钛表面和激活氮的作用,导致钛的液相氮化。同时,也发现生成的氨化层是富Ti的,由δ-TiN和α—Ti组成。

Studies of formation of titanium nitride layer with laser gas alloying by multipulse laser irradiation of 5-ns duration are described. The nitridation process was observed by detecting the light emitted above the surface while it is irradiated. The nitrided surface was morphology-examined by an optical microscope and a scanning electron microscopy (SEM) and characterized by time of light mass spectrum (TOFMS) during laser ablation of the surface as well as by X-ray diffraction (XRD). The laser pulses melt the titanium surface and activate N2, which leads to nitridation of titanium in liquid phase. It is also found that the nitride layer grown is rich in Ti and consists of δ-TiN and α—Ti.