在真空紫外和软X线区镜子表面的反射和散射研究,不论在理论上和实际应用上,都有重要意义。近几年来,随着X线天文望远镜和同步辐射实验装置的兴起,对超光滑表面镜子的加工和测试进行了大量的研究工作。这是因为在上述光谱区,镜子的反射和散射与所照射的光子能量、入射角、镜子表面的状况等的关系更为复杂。这些数据,对研制X线天文望远镜和同步辐射光谱仪器是必不可少的。由于工作的需要,作者于1984年6月在日本高能物理研究所同步辐射实验室,测定了四种不同材料的反射镜在真空紫外和软X线区的反射和散射。这四种材料是融熔石英、普通光学玻璃、微晶玻璃和镍磷合金。所使用的同步辐射光子能量从0.1～1keV(波长12.4～1.24nm),掠射角从0.6°～30°。这些镜子都是中国科学院长春光学精密机械研究所磨制的,其均方根表面粗糙度在日本高能所和长春光机所先后测定,为1nm数量级。镜子抛光后没有镀膜,并放置在大气中达数月之久,然后测试。本文叙述了测量的情况,并图示了镍磷合金镜子的典型曲线。这种材料,目前广泛用作X线望远镜的抛物面反射物镜和同步辐射反射镜。

The design and calibration of soft X-ray telescope and synchrotron radiation monochromator require a knowledge of optical properties of mirror surface for various mirror materials over a fairly wide range of grazing angle and photon energy. For this purpose, the reflection and angle resolved scattering curves of four mirror samples (fused quartz, optical glass, zerodur and electroless nickel) were measured in the photon energy region from 0.1 to 1keV at grazing angles from 0.6° to 30°. The measurement was oaxxied out at the beam lino 11 is mainly used for the Baker grasshopper monochromator and PP xeflectometer. All the samples were polished by CIOM*. The rms roughness of the sample surface were measured by the stylus method at KEK** and CIOM successively. It was in the ordex of lnm. The electroless nickel sample was formed by plating an aluminum disk with Kanigen. A part of the results shown in Figs, 1 and 2 are of electroless nickel which is more often used as a mirror material in soft X-ray telescope and synchrotron xadiatio nmono-chromator.